The parameters of electron cyclotron resonance/radio-frequency hybrid hydrogen plasma adjusted by substrate arrangements

Zhou, H. Y.; Wang, L.; Zhu, X. D.; Ke, B.; Ding, F.; Wen, X. H.; Wang, Y. N.
March 2010
Review of Scientific Instruments;Mar2010, Vol. 81 Issue 3, p033501
Academic Journal
Hybrid hydrogen plasma was formed by biasing 13.56 MHz radio-frequency (rf) power on a substrate immersed in 2.45 GHz microwave electron cyclotron resonance (ECR) plasma. The influences of the substrate configuration on plasma characteristics were investigated. With increasing rf self-bias voltage, electron temperature, Te, increases obviously in the case of the single-electrode substrate, whereas a slight change in Te was observed with the double-electrode substrate condition. Electron density rises almost with a same magnitude under both two substrate conditions. It exhibited that electron energy and density in ECR-rf hybrid mode could be adjusted independently by controlling rf discharge with favorable substrate configurations.


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