Optical coherence tomography for process control of laser micromachining

Wiesner, Markus; Ihlemann, Jürgen; Müller, Heike H.; Lankenau, Eva; Hüttmann, Gereon
March 2010
Review of Scientific Instruments;Mar2010, Vol. 81 Issue 3, p033705
Academic Journal
In situ surface imaging for nondestructive evaluation (NDE) by optical coherence tomography (OCT) before, during, and after ablative laser processing is presented. Furthermore, it is shown that the ability of in situ characterization is beneficial for samples such as optical fibers, which are difficult to handle in the standard analysis. Surface images taken by the OCT are compared with these common analysis tools such as scanning electron microscopy (SEM), reflected-light, and confocal microscopy. An axial resolution of ∼126 nm for surface detection and a lateral resolution <2.5 μm are obtained and the potential of the setup to imaging structures with high aspect ratio is demonstrated.


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