Monolithic integration of plasmonic waveguides into a complimentary metal-oxide-semiconductor- and photonic-compatible platform

Sederberg, S.; Van, V.; Elezzabi, A. Y.
March 2010
Applied Physics Letters;3/22/2010, Vol. 96 Issue 12, p121101
Academic Journal
A silicon-based plasmonic waveguide was designed and fabricated for use at telecommunications wavelengths. This waveguide is interfaced to the silicon photonics platform by use of a tapered silicon-on-insulator waveguide. Simulations indicate that this scheme excites the transverse magnetic plasmonic mode and that the electric fields are confined to the silicon-gold interface. Transmitted power is measured for several device lengths and the propagation distance and coupling efficiency are found to be 2.00 μm and 38.0%, respectively. These results demonstrate the potential for integration between silicon photonics and silicon plasmonic devices and demonstrate the ability to incorporate silicon-based plasmonic devices into complimentary metal-oxide-semiconductor electronic and photonic circuitry.


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