Frequency-resolved temperature imaging of integrated circuits with full field heterodyne interferometry

Suck, S. Y.; Tessier, G.; Warnasooriya, N.; Babuty, A.; De Wilde, Y.
March 2010
Applied Physics Letters;3/22/2010, Vol. 96 Issue 12, p121108
Academic Journal
We report a fast imaging method based on full field heterodyne interferometry for the purpose of frequency resolved temperature imaging. An integrated circuit is supplied with a modulated current resulting into a temperature modulation. The frequency content for this modulation is detected using an object beam and a reference beam, frequency-shifted to create a beating of the interference pattern. We obtain frequency domain spectra of the temperature with excellent precision.


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