TITLE

Spatial distribution of nonemissive metastables in a two-frequency capacitively coupled plasma in Ar by using a pair of optical emission lines

AUTHOR(S)
Ohba, Tomihito; Makabe, Toshiaki
PUB. DATE
March 2010
SOURCE
Applied Physics Letters;3/15/2010, Vol. 96 Issue 11, p111501
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
When a pair of short- and long-lived excited molecules are coupled with an upper radiative state, it will be possible to derive the number density of the long-lived species from the optical emission spectroscopy of upper-level short-lived species by careful selection of the pair. Two-dimensional density distributions of the long-lived metastable state Ar(1s5) and that of the short-lived excited state Ar(2p2) are observed and compared in the time-averaged form, using a computerized tomography technique of the emissions from a pair of optical transitions in a two-frequency capacitively coupled plasma in pure Ar.
ACCESSION #
48698146

 

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