TITLE

Efficient laser-produced plasma extreme ultraviolet sources using grooved Sn targets

AUTHOR(S)
Harilal, S. S.; Sizyuk, T.; Sizyuk, V.; Hassanein, A.
PUB. DATE
March 2010
SOURCE
Applied Physics Letters;3/15/2010, Vol. 96 Issue 11, p111503
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
An efficient extreme ultraviolet (EUV) generation method has been developed with the use of a CO2 laser-produced plasma from a grooved target. A ∼5% conversion efficiency from laser to 13.5 nm photons was obtained with the use of grooves in a tin target or by repeated laser pulse shots at the same target position. Modeling studies proved that the groove target controls the hydrodynamic expansion of the plasma leading to confinement which prevents the plasma escaping from the EUV production zone.
ACCESSION #
48698123

 

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