Maskless etching of silicon using patterned microdischarges

Sankaran, R. M.; Giapis, K. P.
July 2001
Applied Physics Letters;7/30/2001, Vol. 79 Issue 5
Academic Journal
Microdischarges in flexible copper-polyimide structures with hole diameters of 200 μm have been used as stencil masks to pattern bare silicon in CF[sub 4]/Ar chemistry. The discharges were operated at 20 Torr using the substrate as the cathode, achieving etch rates greater than 7 μm/min. Optical emission spectroscopy provides evidence of excited fluorine atoms. The etch profiles show a peculiar shape attributed to plasma expansion into the etched void. Forming discharges in multiple hole and line shapes permits direct pattern transfer in silicon and could be an alternative to ultrasonic milling and laser drilling. © 2001 American Institute of Physics.


Related Articles

  • Metallic contamination in silicon during plasma resist stripping: A deep level transient spectroscopy study. Joubert, O.; Mathiot, D.; Pelletier, J. // Applied Physics Letters;5/29/1989, Vol. 54 Issue 22, p2241 

    Deep level transient spectroscopy is shown to be an easy way to investigate the defects induced in the silicon substrate during photoresist plasma etching. In this study it has been possible to discriminate between the contamination induced by the reactor environment and the contamination due to...

  • Selective dry etching of silicon with respect to germanium. Oehrlein, G. S.; Bestwick, T. D.; Jones, P. L.; Corbett, J. W. // Applied Physics Letters;4/9/1990, Vol. 56 Issue 15, p1436 

    We describe a plasma-based dry etching procedure which permits selective etching of Si over Ge with a Si/Ge etch rate ratio of over 70 and negligible etching of the Ge underlayer. This is achieved in a SF6/H2/CF4 gas mixture by the formation of a thin ([bar_over_tilde:_approx._equal_to]3 nm)...

  • Laser-enhanced plasma etching of silicon. Holber, W.; Reksten, G.; Osgood, R. M. // Applied Physics Letters;1/15/1985, Vol. 46 Issue 2, p201 

    Laser-enhanced etching of Si in a CF4/O2 plasma is described. Both p-type and n-type Si were investigated for different dopant concentrations, at laser intensities from 0–2 W. Etch–rate enhancement, due to thermal and nonthermal effects, was observed.

  • Material-enhanced spatially dependent etch rate of SiO2 in CF4 reactive ion etching. Porkolab, G. A.; Wolf, E. D. // Applied Physics Letters;6/4/1990, Vol. 56 Issue 23, p2319 

    We report on the spatially dependent enhanced etch rate of SiO2 in a CF4 planar reactive ion etcher due to the presence of the compounds GaAs or InP, or the single elements Ti, V, Nb, Ta, Cr, Mo, W, Ni, Pd, Pt, Cu, Ag, Au, Al, Ga, In, or Ge. The etch rate enhancement is maximum immediately...

  • Thermal stability of dry etch damage in SiC. Pearton, S.J.; Lee, J.W. // Applied Physics Letters;5/20/1996, Vol. 68 Issue 21, p2987 

    Assesses the introduction of dry etch damage into n-type silicon carbide. Monitor of the sheet resistance after exposure to argon plasmas; Determination of radio frequency powers for measurable resistance changes; Occurrence of a major annealing stage.

  • Spontaneous production of 10-nm Si structures by plasma etching using self-formed masks. Tada, Tetsuya; Hamoudi, Ali // Applied Physics Letters;5/12/1997, Vol. 70 Issue 19, p2538 

    Analyzes the production of silicon nanostructures by plasma etching using self-formed masks. Conditions required for the production of nanostructures; Details of the condensation mechanism; Factors determining the pillar diameter.

  • Pulse-modulated microwave plasma etching. Grabowski, C.; Gahl, J. M. // Journal of Applied Physics;7/15/1991, Vol. 70 Issue 2, p1039 

    Presents studies on the etching characteristics of silicon in a microwave plasma etching system having a pulse-modulated source. Etch rates for pulsed radio-frequency discharges; Equipment used for the experiment; Passage of plasma through chambers.

  • Plasma etch effects on low-temperature selective epitaxial growth of silicon. Lou, Jen-Chung; Oldham, William G.; Kawayoshi, Harry; Ling, Peiching // Journal of Applied Physics;4/1/1992, Vol. 71 Issue 7, p3225 

    Provides information on a study that investigated the effects of plasma etching on selective epitaxial growth of silicon. Details on the epitaxial procedure; Results and discussion; Conclusions.

  • Atomic-order layer-by-layer role-share etching of silicon nitride using an electron cyclotron... Matsuura, Takashi; Honda, Yasuhiko; Murota, Junichi // Applied Physics Letters;6/6/1999, Vol. 74 Issue 23, p3573 

    Studies atomic-order layer-by-layer etching of silicon nitride using an ultraclean electron-cyclotron-resonance plasma. Surface nitrogen atoms in silicon nitride found to be removed selectively by excited hydrogen gas under well-controlled conditions; Removal of outermost silicon atoms by...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics