TITLE

Synthesis of large area aligned carbon nanotube arrays from C[sub 2]H[sub 2]–H[sub 2] mixture by rf plasma-enhanced chemical vapor deposition

AUTHOR(S)
Wang, Y. H.; Lin, J.; Huan, C. H. A.; Chen, G. S.
PUB. DATE
July 2001
SOURCE
Applied Physics Letters;7/30/2001, Vol. 79 Issue 5
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Large area aligned carbon nanotube (CNT) arrays have been successfully synthesized from C[sub 2]H[sub 2] and H[sub 2] mixture by rf plasma-enhanced chemical vapor deposition (without hot filament) on iron-coated silicon substrates. H[sub 2] plasma (not H[sub 2] gas) was confirmed to play the role of reducing iron oxide to metallic iron and promoting the formation of evenly separated particles, as well as being the primary factor in synthesizing aligned CNTs. The addition of H[sub 2] gas with no plasma during the growth resulted in randomly oriented CNTs. Meanwhile, without the addition of H[sub 2], the C[sub 2]H[sub 2] plasma resulted in the growth of very fine worm-like carbon fibers. Using substrates with a thicker catalyst layer (>90 nm) reduced the CNT density significantly. © 2001 American Institute of Physics.
ACCESSION #
4864252

 

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