Low temperature exfoliation process in hydrogen-implanted germanium layers

Ferain, I. P.; Byun, K. Y.; Colinge, C. A.; Brightup, S.; Goorsky, M. S.
March 2010
Journal of Applied Physics;Mar2010, Vol. 107 Issue 5, p054315
Academic Journal
The feasibility of transferring hydrogen-implanted germanium to silicon with a reduced thermal budget is demonstrated. Germanium samples were implanted with a splitting dose of 5×1016 H2+ cm-2 at 180 keV and a two-step anneal was performed. Surface roughness and x-ray diffraction pattern measurements, combined with cross-sectional TEM analysis of hydrogen-implanted germanium samples were carried out in order to understand the exfoliation mechanism as a function of the thermal budget. It is shown that the first anneal performed at low temperature (≤150 °C for 22 h) enhances the nucleation of hydrogen platelets significantly. The second anneal is performed at 300 °C for 5 min and is shown to complete the exfoliation process by triggering the formation of extended platelets. Two key results are highlighted: (i) in a reduced thermal budget approach, the transfer of hydrogen-implanted germanium is found to follow a mechanism similar to the transfer of hydrogen-implanted InP and GaAs, (ii) such a low thermal budget (<300 °C) is found to be suitable for directly bonded heterogeneous substrates, such as germanium bonded to silicon, where different thermal expansion coefficients are involved.


Related Articles

  • In situ x-ray diffraction studies on epitaxial VO2 films grown on c-Al2O3 during thermally induced insulator-metal transition. Okimura, Kunio; Sakai, Joe; Ramanathan, Shriram // Journal of Applied Physics;Mar2010, Vol. 107 Issue 6, p063503 

    The structural phase transition (SPT) of VO2 films epitaxially grown on c-Al2O3 substrates by pulsed laser deposition and reactive sputtering was investigated by in situ temperature-controlled x-ray diffraction (XRD) across metal-insulator transition (MIT). An intermediate insulator phase was...

  • Bilayer thickness estimations with “poor” diffraction data. Rappolt, Michael // Journal of Applied Physics;Apr2010, Vol. 107 Issue 8, p084701 

    The lamellar fluid phase (smectic A) is the biologically most relevant membrane structure and is extensively studied by x-ray (neutron) diffraction. However, either due to experimental limitations or due to lattice disorder bilayer diffraction pattern display often not more than 2–3...

  • Lead-free potassium bismuth titanate thin film with complex Aurivillius layer structure. Cheng, Z. X.; Wang, X. L.; Zhao, H. Y.; Kimura, H. // Journal of Applied Physics;Apr2010, Vol. 107 Issue 8, p084105 

    A ferroelectric thin film of Aurivillius phase K0.5Bi4.5Ti4O15 (KBT) with a complex bismuth layer-structure was fabricated using the pulsed laser deposition method. The thin film grown on Pt/Ti/SiO2/Si substrate shows a strong c-axis orientation, as revealed by x-ray diffraction results, and...

  • Substitutional and clustered B in ion implanted Ge: Strain determination. Bisognin, G.; Vangelista, S.; Berti, M.; Impellizzeri, G.; Grimaldi, M. G. // Journal of Applied Physics;Jun2010, Vol. 107 Issue 10, p103512 

    The lattice strain induced both by substitutional and clustered B in B-implanted Ge samples has been investigated by means of high resolution x-ray diffraction (HRXRD). The main results can be summarized as follows: while substitutional (i.e., electrically active) B exhibits a negative strain,...

  • Domain mapping of a Ca-doped manganite. Turner, Joshua J.; Jordan-Sweet, Jean L.; Upton, Mary; Hill, John P.; Tokura, Yoshinori; Tomioka, Yasuhide; Kevan, Stephen D. // Applied Physics Letters;3/31/2008, Vol. 92 Issue 13, p131907 

    We have performed microdiffraction experiments to map the crystallographic domain structure of the Ca-doped manganite Pr0.5Ca0.5MnO3 by microfocusing x-rays through a glass capillary. Domain structure on the order of a few microns is observed. We suggest that this finding implies that the...

  • Diffraction of strongly convergent X-rays from picosecond acoustic transients. Shymanovich, U.; Nicoul, M.; Blums, J.; Sokolowski-Tinten, K.; Tarasevitch, A.; Wietler, T.; Horn von Hoegen, M.; von der Linde, D. // Applied Physics A: Materials Science & Processing;Apr2007, Vol. 87 Issue 1, p7 

    Following femtosecond laser excitation, large transient changes in the X-raydiffraction efficiency have been observed in thin crystalline films of germanium. This behavior is explained in terms of the thermo-acoustic response of the impulsively heated material, when an inhomogeneously strained...

  • Synthesis, structure, and electrical behavior of Sr4Bi4Ti7O24. Zurbuchen, M. A.; Sherman, V. O.; Tagantsev, A. K.; Schubert, J.; Hawley, M. E.; Fong, D. D.; Streiffer, S. K.; Jia, Y.; Tian, W.; Schlom, D. G. // Journal of Applied Physics;Jan2010, Vol. 107 Issue 2, p024106 

    An n=7 Aurivillius phase, Sr4Bi4Ti7O24, with c=6.44 nm, was synthesized as an epitaxial (001)-oriented film. This phase and its purity were confirmed by x-ray diffraction and transmission electron microscopy. The material is ferroelectric, with a Pr=5.3 μC/cm2 oriented in the (001) plane and...

  • Interfacial engineering and coupling of electric and magnetic properties in Pb(Zr0.53Ti0.47)O3/CoFe2O4 multiferroic epitaxial multilayers. Zhang, J. X.; Dai, J. Y.; Chan, H. L. W. // Journal of Applied Physics;Jun2010, Vol. 107 Issue 10, p104105 

    Epitaxial magnetoelectric (ME) Pb(Zr0.53Ti0.47)O3(PZT)/CoFe2O4(CFO) multilayer nanocomposite thin films with up to 11 alternative layers are grown on Nb doped SrTiO3 (STO) substrates by pulsed-laser deposition. X-ray diffraction and high resolution transmission electron microscopy studies reveal...

  • Crystallization and phase separation in Ge[sub 2+x]Sb[sub 2]Te[sub 5] thin films. Privitera, S.; Rimini, F.; Bongiorno, C.; Zonca, R.; Pirovano, A.; Bez, R. // Journal of Applied Physics;10/1/2003, Vol. 94 Issue 7, p4409 

    The electrical properties and the structure of isothermally annealed thin films of Ge[sub 2+x]Sb[sub 2]Te[sub 5] (x=0 and 0.5) have been studied by in situ electrical measurements, x-ray diffraction, and transmission electron microscopy analyses. Phase separation has been observed in samples...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics