Boron ion source based on planar magnetron discharge in self-sputtering mode

Gushenets, V. I.; Hershcovitch, A.; Kulevoy, T. V.; Oks, E. M.; Savkin, K. P.; Vizir, A. V.; Yushkov, G. Yu.
February 2010
Review of Scientific Instruments;Feb2010, Vol. 81 Issue 2, p02B303
Academic Journal
An ion source based on a planar magnetron sputtering device with thermally isolated target has been designed and demonstrated. For a boron sputtering target, high target temperature is required because boron has low electrical conductivity at room temperature, increasing with temperature. The target is well-insulated thermally and can be heated by an initial low-current, high-voltage discharge mode. A discharge power of 16 W was adequate to attain the required surface temperature (400 °C), followed by transition of the discharge to a high-current, low-voltage mode for which the magnetron enters a self-sputtering operational mode. Beam analysis was performed with a time-of-flight system; the maximum boron ion fraction in the beam is greater than 99%, and the mean boron ion fraction, time-integrated over the whole pulse length, is about 95%. We have plans to make the ion source steady state and test with a bending magnet. This kind of boron ion source could be competitive to conventional boron ion sources that utilize compounds such as BF3, and could be useful for semiconductor industry application.


Related Articles

  • Chips back on the menu.  // Engineer (00137758);11/8/2002 Supplement, Vol. 291 Issue 7615, p13 

    Reports on trends in the market for semiconductor chips as of 2002. Average turnover of semiconductor chip manufacturers; Annual growth of the market; Signs of market recovery.

  • Strategic partnerships: Critical to foundry success. McClean, Bill // Solid State Technology;Oct2003, Vol. 46 Issue 10, p112 

    Provides insights on the foundry business model. List of entrants in the integrated circuit foundry market; Business landscape in the foundry segment; Trend toward outsourcing IC fabrication to foundries; Impact of the emergence of pure-play foundries on future IC industry production;...

  • 90nm and beyond: Why go it alone? Meyer, Kevin // Solid State Technology;Oct2003, Vol. 46 Issue 10, p112 

    Provides insights on the foundry business model. Factors keeping semiconductor companies stuck at the node much longer than expected; Lessons learned at the 130nm node; Key to bringing advanced technology nodes to market; Challenges in the semiconductor industry.

  • Untitled. Levine, Bernard; Dorsch, Jeff // Electronic News;10/25/93, Vol. 39 Issue 1986, p21 

    Reports on developments in the semiconductor industry. Sheldahl's agreement in principle to acquire Datakey in a stock exchange; Sheldahl's leading of an eight-member consortium exploring laminate multichip modules funded by the government; Establishment of a business agreement with Unisys Corp....

  • Afdec figures.  // Electronics Weekly;10/22/2003, Issue 2120, p14 

    This article presents information regarding data on the component distribution market of Great Britain, supplied by industry association Afdec. There is also an evidence that the dealer fraternity is experiencing strong demand which has historically been an indication of better times to come.

  • Chip market could grow 15% in 2011.  // Electronics Weekly;5/11/2011, Issue 2467, p2 

    The article reports that growth in the chip market for 2011 could be 15%.

  • Chip forecast falls, but some prices rise.  // Indianapolis Business Journal;11/4/2002, Vol. 23 Issue 34, p23A 

    Reports on the organization World Semiconductor Trade Statistics' reduction of its global sales forecast for 2003 for worldwide semiconductor sales. Impact of the decline in demand for consumer electronics on manufacturers of semiconductors and chip manufacturing equipment; Prices of high-speed...

  • ABI predicts 19% growth in power semiconductor and IC markets.  // RCR;11/09/98, Vol. 17 Issue 45, p43 

    Reports on the projected growth of the market for power semiconductors, integrated circuits and modules by the end of 2003.

  • Capacity shortfall could drive chips, says analyst. Manners, David // Electronics Weekly;11/6/2002, Issue 2075, p6 

    Focuses on the integrated circuits industry in Great Britain as of November 2002. Predicted financial growth for the semiconductor market in 2003; Status of the overall pricing trend; Estimated increase in capacity by 2003.


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics