Self-heated hollow cathode discharge system for charged particle sources and plasma generators

Gushenets, V. I.; Bugaev, A. S.; Oks, E. M.; Schanin, P. M.; Goncharov, A. A.
February 2010
Review of Scientific Instruments;Feb2010, Vol. 81 Issue 2, p02B305
Academic Journal
This paper presents the results of experimental studies of a new design of discharge system using a self-heated hollow cathode. The discharge system offers certain advantages that are attractive for use in high-dose ion implantation, plasma generators, and plasma electron sources.


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