Improved piezoelectric actuators for use in high-speed pulsed valves

Proctor, David L.; Albert, Daniel R.; Davis, H. Floyd
February 2010
Review of Scientific Instruments;Feb2010, Vol. 81 Issue 2, p023106
Academic Journal
We describe the assembly of piezoelectric actuators suitable for use in Proch–Trickl pulsed gas valves employed in pulsed molecular beam experiments. In their simplest form, these actuators have performance equal to and resistance to chemical attack far superior to the recently discontinued commercial actuator around which the valve was originally designed. New actuators have been designed employing several different dual piezo configurations. The dual piezo design reliably produces shorter pulses than the original actuator, resulting in reduced gas consumption and lower average source chamber pressures for a given backing pressure and pulse rate. By electrically isolating the actuator assembly, active adjustment of the closed position may be achieved by simple addition of a continuous voltage bias.


Related Articles

  • A high-temperature piezoelectric linear actuator operating in two orthogonal first bending modes. Chen, Jianguo; Chen, Zhijiang; Li, Xiaotian; Dong, Shuxiang // Applied Physics Letters;2/4/2013, Vol. 102 Issue 5, p052902 

    Conventionally, piezoelectric ultrasonic linear actuators operate in longitudinal and bending combination (degenerate) modes for producing an elliptic motion which drives a slider moving linearly. With the increasing temperature, the degenerate mode will split into two separated modes again,...

  • Piezoelectric dispenser based on a piezoelectric-metal-cavity actuator. Lam, K. H.; Sun, C. L.; Kwok, K. W.; Chan, H. L. W // Review of Scientific Instruments;Jul2009, Vol. 80 Issue 7, p075110 

    A piezoelectric dispenser has been fabricated based on the idea of a piezoelectric-metal-cavity (PMC) actuator. The PMC actuator consists of a metal ring sandwiched between two identical piezoelectric unimorphs. The radial contraction of the piezoelectric ceramic is converted into a...

  • Thermal effect on piezoelectric stick-slip actuator systems. Li, J. W.; Yang, G. S.; Zhang, W. J.; Tu, S. D.; Chen, X. B. // Review of Scientific Instruments;Apr2008, Vol. 79 Issue 4, p046108 

    The piezoelectric stick-slip (PZT-SS) actuator is known to achieve motion with a theoretically unlimited range yet high resolution (several nanometers). In this type of actuator, friction plays an active role in producing a meaningful stick-slip motion. However, friction is a source of heat...

  • Characteristics of a piezoelectric pulsed nozzle beam. Andresen, P.; Faubel, M.; Haeusler, D.; Kraft, G.; Luelf, H.-W.; Skofronick, J. G. // Review of Scientific Instruments;Nov85, Vol. 56 Issue 11, p2038 

    The characteristics of a molecular beam from a piezoelectric pulsed nozzle source are given and, where appropriate, compared to a continuous beam. These include variation during the pulse in the relative intensity and speed ratio for the gases He, Ar, Ne, and N[sub 2]. The measurements were made...

  • A high-intensity multi-purpose piezoelectric pulsed molecular beam source. Proch, D.; Trickl, T. // Review of Scientific Instruments;Apr89, Vol. 60 Issue 4, p713 

    A piezoelectric valve is described which delivers intense gas pulses limited by the nozzle for diameters of up to 1.0 mm. Minimum pulse lengths between 0.15 and 0.25 ms (fwhm) are obtained at full opening, depending on the nozzle size. The upper limit of the repetition rate is near 1 kHz. The...

  • Development of a piezoelectric micropump with novel separable design. Wen-Fu Luo; Hsiao-Kang Ma // Applied Mechanics & Materials;2014, Issue 667-679, p1426 

    In this study, partially disposable piezoelectric micropumps with separable design have been developed and discussed. The actuator, a rectangular piezo-plate, can be separated and be used repeatedly while the pump chamber is single-use to prevent infection. Thus, a low cost and waste solution...

  • Switched capacitor charge pump reduces hysteresis of piezoelectric actuators over a large frequency range. Huang, Liang; Ma, Yu Ting; Feng, Zhi Hua; Kong, Fan Rang // Review of Scientific Instruments;Sep2010, Vol. 81 Issue 9, p094701 

    Piezoelectric actuators exhibit large hysteresis between the applied voltage and their displacement. A switched capacitor charge pump is proposed to reduce hysteresis and linearize the movement of piezoelectric actuators. By pumping the same amount of charges into the piezoelectric actuator...

  • Note: Pseudo-charge-driver for grounded piezoelectric actuators with high linearity. Liansheng Zhang; Jie Zhang; Zhihua Fenga // Review of Scientific Instruments;2014, Vol. 85 Issue 3, p1 

    This paper proposed a new method to drive grounded piezoelectric actuators linearly with high voltage using mirror actuator. One actuator is used for reference which is under charge drive while the other one named target actuator is under voltage drive, but the voltages applied on them are...

  • Molecular-beam epitaxy of a strongly lattice-mismatched heterosystem AlN/Si(111) for application in SAW devices. Kipshidze, D. G.; Schenk, H. P.; Fissel, A.; Kaiser, U.; Schulze, J.; Richter, Wo.; Weihnacht, M.; Kunze, R.; Kr�usslich, J. // Semiconductors;Nov99, Vol. 33 Issue 11, p1241 

    The results of using molecular-beam epitaxy for growing piezoelectric AlN films on Si (111) substrates suitable for device applications are reported. The technological conditions for growth of stoichiometric AlN by controlling the surface reconstruction occurring under various thermodynamic...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics