TITLE

Fabrication of silicon nanobump arrays by near-field enhanced laser irradiation

AUTHOR(S)
Wang, X. C.; Zheng, H. Y.; Tan, C. W.; Wang, F.; Yu, H. Y.; Pey, K. L.
PUB. DATE
February 2010
SOURCE
Applied Physics Letters;Feb2010, Vol. 96 Issue 8, p084101
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A simple approach to fabricate two-dimensional nanobump arrays on silicon (Si) substrate is reported. In the process, a single 248 nm excimer laser pulse was applied on a self-assembled monolayer of 1.5-μm-diameter silica microspheres on a n-doped (100) Si wafer. After laser irradiation at a fluence of 300 mJ/cm2, a regular array of conical Si nanobumps surrounded by a ring shaped trench were fabricated. The structure of the nanobump arrays was characterized by scanning electron microscope, and atomic force microscope. The formed nanobumps were determined to be Si-based bumps with energy disperse spectroscopy. The mechanisms involved in the formation of nanobumps were discussed.
ACCESSION #
48352135

 

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