Parallel integration and characterization of nanoscaled epitaxial lattices by concurrent molecular layer epitaxy and diffractometry

Ohnishi, T.; Komiyama, D.; Koida, T.; Ohashi, S.; Stauter, C.; Koinuma, H.; Ohtomo, A.; Lippmaa, M.; Nakagawa, N.; Kawasaki, M.; Kikuchi, T.; Omote, K.
July 2001
Applied Physics Letters;7/23/2001, Vol. 79 Issue 4
Academic Journal
A material highway for building up crystal lattices and heterojunctions from molecular layers has been developed based on a concept of combinatorial lattice integration. The atomic-scale precision of automated multilane paving of multilayered thin films is in situ monitored by concurrent reflection high-energy electron diffraction. The designed nanolayered structures are rapidly verified by a concurrent x-ray diffractometer which has been developed for the purpose of this technology. This scheme corresponds to the concurrent two-dimensional Merrifield synthesis to form a variety of sequence-controlled layer structures in parallel and should be widely applicable for systematic fabrication and property screening of nanostructured materials and devices. © 2001 American Institute of Physics.


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