Infrared properties of room-temperature-deposited ZrO[sub 2]

Koltunski, L.; Devine, R. A. B.
July 2001
Applied Physics Letters;7/16/2001, Vol. 79 Issue 3
Academic Journal
ZrO[sub 2] films have been deposited at room temperature using Zr(OC[sub 4]H[sub 9])[sub 4] and O[sub 2] source gases in a low-pressure electron-cyclotron-resonance-excited plasma reactor. The deposited films were, in general, mixed (amorphous and polycrystalline; monoclinic or tetragonal), the crystallinity depending upon the substrate polarization during deposition and the postdeposition annealing. Infrared vibrational modes of the films have been characterized. In as-deposited films, the dielectric constants were ∼12–18, dependent upon sample bias during deposition, and the refractive indices were ∼1.85–1.92. © 2001 American Institute of Physics.


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