On the mechanism of the cubic phase formation in the boron nitride thin-film systems

Khizroev, Sakhrat; Litvinov, Dmitri
July 2001
Applied Physics Letters;7/16/2001, Vol. 79 Issue 3
Academic Journal
This work addresses the issue of cubic phase formation in boron nitride thin-film systems. The presented data suggest strain-induced formation of cubic phase. The compliant nature of the turbostratic boron nitride buffer layer is shown to be an essential factor for cubic phase nucleation. Two distinct regimes of cubic phase formation are observed. First, a cubic boron nitride seed layer is formed on top of the turbostratic boron nitride buffer layer under nitrogen ion irradiation of the growth surface. This is followed by the growth mode of the cubic phase, which requires a different set of growth conditions. The role of nitrogen ion irradiation in two deposition regimes is discussed. © 2001 American Institute of Physics.


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