TITLE

High current diffuse dielectric barrier discharge in atmospheric pressure air for the deposition of thin silica-like films

AUTHOR(S)
Starostin, S. A.; Premkumar, P. Antony; Creatore, M.; de Vries, H.; Paffen, R. M. J.; van de Sanden, M. C. M.
PUB. DATE
February 2010
SOURCE
Applied Physics Letters;2/8/2010, Vol. 96 Issue 6, p061502
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The diffuse dielectric barrier discharge in atmospheric pressure air was applied for the thin film deposition on polymeric web in industrially relevant roll-to-roll configuration. The silica-like film deposition was performed using the admixture of hexamethyldisiloxane precursor to air flow. Fast discharge imaging at 2 μs exposure time confirms plasma uniformity in a single current pulse time scale. Morphology and composition analyses indicate that the process results in ultrasmooth films (roughness comparable to initial substrate roughness) and shows the possibility to synthesize carbon-free layers.
ACCESSION #
48067940

 

Related Articles

  • A long plasma column in a flexible tube at atmospheric pressure. Yong Cheol Hong; Soon Cheon Cho; Jong Hun Kim; Han Sup Uhm // Physics of Plasmas;Jul2007, Vol. 14 Issue 7, p074502 

    Atmospheric-pressure nonthermal plasma produced at a low frequency in a flexible dielectric tube in an argon gas flow is presented. The plasma system consists of a typical injection needle as a hot electrode, a Teflon® tube as a dielectric, and a high voltage power supply. The plasma column...

  • Atmospheric Pressure Plasma Discharge for Polysiloxane Thin Films Deposition and Comparison with Low Pressure Process. Siliprandi, Riccardo A.; Zanini, Stefano; Grimoldi, Elisa; Fumagalli, Francesco S.; Barni, Ruggero; Riccardi, Claudia // Plasma Chemistry & Plasma Processing;Apr2011, Vol. 31 Issue 2, p353 

    n atmospheric pressure dielectric barrier plasma discharge has been used to study a thin film deposition process. The DBD device is enclosed in a vacuum chamber and one of the electrodes is a rotating cylinder. Thus, this device is able to simulate continuous processing in arbitrary deposition...

  • Atmospheric pressure microplasma jet as a depositing tool. Benedikt, J.; Focke, K.; Yanguas-Gil, A.; von Keudell, A. // Applied Physics Letters;12/18/2006, Vol. 89 Issue 25, p251504 

    An atmospheric pressure microplasma jet is developed for depositing homogeneous thin films from C2H2. The adjustment of the gas flow through the microplasma jet assures optimal flow conditions as well as minimizes deposition inside the jet. In addition, the formation of an argon boundary layer...

  • Investigation of the Atmospheric Helium Dielectric Barrier Discharge Driven by a Realistic Distorted-Sinusoidal Voltage Power Source. Hung, C.-T.; Chiu, Y.-M.; Hwang, F.-N.; Chiang, M.-H.; Wu, J.-S.; Wang, Y.-C. // Plasma Chemistry & Plasma Processing;Feb2011, Vol. 31 Issue 1, p1 

    The non-equilibrium atmospheric-pressure parallel-plate helium dielectric barrier discharge (DBD) driven by a realistic 20 kHz distorted-sinusoidal voltage waveform has been investigated by means of simulations and experiments. A self-consistent one-dimensional fluid modeling code considering...

  • Temporal evolution of dielectric barrier discharge microplasma. Blajan, Marius; Shimizu, Kazuo // Applied Physics Letters;9/3/2012, Vol. 101 Issue 10, p104101 

    Analysis of dielectric barrier discharge microplasma at atmospheric pressure was carried out using emission spectroscopy and imaging techniques. Temporal evolution of the discharge and also its filamentary mode was observed for the discharge in 3% N2 in Ar at the microdischarge level. Light...

  • The effect of dielectric thickness on diffuse nanosecond dielectric barrier discharges using a needle array-plate electrode configuration in air at atmospheric pressure. Liu, Zhi-jie; Wang, Wen-chun; Yang, De-zheng; Zhang, Shuai; Yang, Yang; Tang, Kai // Journal of Applied Physics;Jun2013, Vol. 113 Issue 23, p233305 

    A stable diffuse large-area air plasma with low gas temperature is developed under different dielectric thicknesses by using a needle array-plate electrode configuration in air at atmospheric pressure, which is excited by a bipolar nanosecond pulse power with about 20 ns rising time. The images...

  • Wavelength tuning of surface plasmon resonance using dielectric layers on silver island films. Xu, G.; Tazawa, M.; Jin, P.; Nakao, S.; Yoshimura, K. // Applied Physics Letters;6/2/2003, Vol. 82 Issue 22, p3811 

    A simple and effective method was demonstrated to tune surface plasmon resonance (SPR) wavelength of silver island films by introducing a dielectric medium to vary interisland dielectric constant. The medium, either overcoating or sandwiching the silver islands, can make a dramatic effect on the...

  • Influence of the Plasma of Nanosecond Diffuse Discharge in Air at Atmospheric Pressure on the Electrophysical Properties of Epitaxial CdHgTe Films. Lozovoy, K. A.; Grigoryev, D. V.; Tarasenko, V. F.; Shulepov, M. A. // Key Engineering Materials;2016, Vol. 685, p676 

    In this paper the influence of the volume discharge of nanosecond duration formed in a non-uniform electric field at atmospheric pressure on samples of CdHgTe (MCT) epitaxial films of p-type conductivity is investigated. Measurements of electro-physical parameters of MCT samples after...

  • Probe diagnostics of strongly ionized inert-gas plasmas at atmospheric pressure. Baksht, F. G.; Mitrofanov, N. K.; Rybakov, A. B.; Shkol’nik, S. M. // Technical Physics;Jun98, Vol. 43 Issue 6, p660 

    The technique of probe measurements (experiment and theory) is applied in a dense, strongly ionized inert-gas plasma at atmospheric pressure. The measurements are performed in a high-current (250–550 A) free-burning argon arc with a thermionic cathode. As a control technique we used...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics