TITLE

A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications

AUTHOR(S)
Wencheng Xu; Seokheun Choi; Junseok Chae
PUB. DATE
February 2010
SOURCE
Applied Physics Letters;2/1/2010, Vol. 96 Issue 5, p053703
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
This letter reports an acoustic resonator of high quality factors (Qs) operating in liquid media. The film bulk acoustic resonator (FBAR) is made of a ring-shaped piezoelectric aluminum nitride thin film, and is excited in a contour mode. By having a low motional resistance upon coupling with liquids, the contour mode FBAR achieved Qs up to 189, more than 12× over the state-of-the-art FBARs in liquids. The resonator was characterized by an aptamer—thrombin binding pair for a biosensor and showed a mass resolution of 1.78 ng/cm2.
ACCESSION #
47929079

 

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