Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas

Hyo-Chang Lee; Min-Hyong Lee; Chin-Wook Chung
January 2010
Applied Physics Letters;1/25/2010, Vol. 96 Issue 4, p041503
Academic Journal
The transition from nonlocal to local kinetics was observed through the spatially resolved measurements of electron energy distribution functions in inductively coupled plasmas. As gas pressures increase, the spatial profiles of the effective electron temperatures (Teff) from the electron energy distribution functions changed dramatically from hollow shapes to flat shapes. With further increases in gas pressures, the Teff had saddle-shaped profiles with the highest Teff in the vicinity of an antenna coil. These changes in the radial profiles of the Teff show a transition of the electron kinetics from nonlocal to local regimes. This transition occurred when the electron energy relaxation lengths became smaller than the antenna half size.


Related Articles

  • Modulating effects of the low-frequency source on ion energy distributions in a dual frequency capacitively coupled plasma. Xiao-Song Li; Zhen-Hua Bi; Da-Lei Chang; Zhi-Cheng Li; Shuai Wang; Xiang Xu; Yong Xu; Wen-Qi Lu; Ai-Min Zhu; You-Nian Wang // Applied Physics Letters;7/21/2008, Vol. 93 Issue 3, p031504 

    With the energy resolved quadrupole mass spectrometer and hybrid simulation, the influence of low-frequency (LF) source parameters on the ion energy distributions (IEDs) of argon ions impinging on the grounded electrode was studied, both experimentally and numerically, in a dual frequency...

  • Transition of RF internal antenna plasma by gas control. Hamajima, Takafumi; Yamauchi, Toshihiko; Kobayashi, Seiji; Hiruta, Toshihito; Kanno, Yoshinori // AIP Conference Proceedings;7/12/2012, Vol. 1465 Issue 1, p261 

    The transition between the capacitively coupled plasma (CCP) and the inductively coupled plasma (ICP) was investigated with the internal radio frequency (RF) multi-turn antenna. The transition between them showed the hysteresis curve. The radiation power and the period of the self-pulse mode...

  • Spectral energy content of parametrically excited second harmonic emissions from laser plasmas. Sinha, B. K.; Kumbhare, S. R. // Physics of Fluids (00319171);Oct88, Vol. 31 Issue 10, p3155 

    Experiments were conducted using a 1.0641 µ laser to measure the spectral profiles of second harmonic emissions from laser plasmas produced on planar, slab targets of carbon, aluminum, and copper at laser intensities varying from 2 × 10[sup 12] to 9 × 10[sup 13] W/cm². It is...

  • Global rate coefficients for ionization and recombination of carbon, nitrogen, oxygen, and argon. Annaloro, Julien; Morel, Vincent; Bultel, Arnaud; Omaly, Pierre // Physics of Plasmas;Jul2012, Vol. 19 Issue 7, p073515 

    The flow field modeling of planetary entry plasmas, laser-induced plasmas, inductively coupled plasmas, arcjets, etc., requires to use Navier-Stokes codes. The kinetic mechanisms implemented in these codes involve global (effective) rate coefficients. These rate coefficients result from the...

  • �Use of oxidation and reduction vapor generation for lowering the detection limits of iodine in biological samples by inductively coupled plasma atomic emission spectrometry�. Vtorushina, E.; Saprykin, A.; Knapp, G. // Journal of Analytical Chemistry;Jul2009, Vol. 64 Issue 7, p765 

    A correction to the article "Use of Oxidation and Reduction Vapor Generation for Lowering the Detection Limits of Iodine in Biological Samples by Inductively Coupled Plasma Atomic Emission Spectrometry" that was published in the previous issue is presented.

  • Angular emission of ions and mass deposition from femtosecond and nanosecond laser-produced plasmas. Verhoff, B.; Harilal, S. S.; Hassanein, A. // Journal of Applied Physics;Jun2012, Vol. 111 Issue 12, p123304 

    We investigated the angular distribution of ions and atoms emanating from femto- and nanosecond laser-produced metal plasmas under similar laser fluence conditions. For producing plasmas, aluminum targets are ablated in vacuum employing pulses from a Ti:Sapphire ultrafast laser (40 fs, 800 nm)...

  • Exact solutions: classical electron model. Bijalwan, Naveen // Astrophysics & Space Science;Oct2011, Vol. 336 Issue 2, p485 

    Rahaman et al. (Astrophys. Space. Sci. 331:191-197, ) discussed some classical electron models (CEM) in general relativity. Bijalwan (Astrophys. Space. Sci. 334:139-143, ) present a general exact solution of the Einstein-Maxwell equations in terms of pressure. We showed that charged fluid...

  • Simultaneous determination of certain selected trace elements with an on-line preconcentrating flow injection ICP-OES system. du Plessis, Hanneli; Rademeyer, Cornelius J.; van Staden, Jacobus F. // South African Journal of Chemistry;Mar99, Vol. 52 Issue 1, p27 

    The detection limits of an ICP instrument were improved by on-line preconcentrating samples on a miniature ion exchange column incorporated into the conduits of a flow injection (FI) system. Several operating parameters for both the ICP and the ion exchange column were optimised to maximise the...

  • High resolution benchtop ICP.  // Laboratory Equipment;Dec99, Vol. 36 Issue 8, p1 

    Features Leeman Labs Inc.'s Profile Benchtop ICP laboratory machine. Use for inductively coupled plasma (ICP) spectrometry; Incorporation of WinICP software with the Semi-quant rapid screening program; Interface to Microsoft Office products.


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics