TITLE

Flexible high-frequency microwave inductors and capacitors integrated on a polyethylene terephthalate substrate

AUTHOR(S)
Lei Sun; Guoxuan Qin; Hai Huang; Han Zhou; Behdad, Nader; Weidong Zhou; Zhenqiang Ma
PUB. DATE
January 2010
SOURCE
Applied Physics Letters;1/4/2010, Vol. 96 Issue 1, p013509
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
This letter reports the realization of bendable inductors and capacitors integrated on a polyethylene terephthalate substrate that can operate at high microwave frequencies. A low-temperature fabrication process compatible with flexible thin-film transistors (TFTs) was developed. By employing bendable dielectric materials, spiral inductors and metal-insulator-metal capacitors with high quality factors and high resonance frequencies were demonstrated. The effects of mechanical bending on the performance of inductors and capacitors were also measured and analyzed. These demonstrations combined with previously demonstrated microwave TFTs will lead to flexible radio-frequency and microwave systems in the future.
ACCESSION #
47416449

 

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