Flexible high-frequency microwave inductors and capacitors integrated on a polyethylene terephthalate substrate

Lei Sun; Guoxuan Qin; Hai Huang; Han Zhou; Behdad, Nader; Weidong Zhou; Zhenqiang Ma
January 2010
Applied Physics Letters;1/4/2010, Vol. 96 Issue 1, p013509
Academic Journal
This letter reports the realization of bendable inductors and capacitors integrated on a polyethylene terephthalate substrate that can operate at high microwave frequencies. A low-temperature fabrication process compatible with flexible thin-film transistors (TFTs) was developed. By employing bendable dielectric materials, spiral inductors and metal-insulator-metal capacitors with high quality factors and high resonance frequencies were demonstrated. The effects of mechanical bending on the performance of inductors and capacitors were also measured and analyzed. These demonstrations combined with previously demonstrated microwave TFTs will lead to flexible radio-frequency and microwave systems in the future.


Related Articles

  • Structural and dielectric properties of spin-on barium-strontium titanate thin films. Ivanov, D.; Caron, M.; Ouellet, L.; Blain, S.; Hendricks, N.; Currie, J. // Journal of Applied Physics;3/15/1995, Vol. 77 Issue 6, p2666 

    Presents the results of a study of Ba[sub0.5]Sr[sub0.5]TiO[sub3] (BST) thin film capacitors fabricated by a spin-on technique. Mechanisms that are possible in a dielectric material; Preparation of BST capacitor samples; Information on the BST thin film structure and morphology; Data on the...

  • Low-loss tunable capacitors fabricated directly on gold bottom electrodes. Jiwei Lu; Schmidt, Steffen; Boesch, Damien S.; Pervez, Nadia; York, Robert A.; Stemmer, Susanne // Applied Physics Letters;3/13/2006, Vol. 88 Issue 11, p112905 

    At microwave frequencies, conductor losses due to the bottom electrode resistance severely limit the performance of metal-insulator-metal capacitors that employ tunable dielectric thin films. Here we demonstrate that a novel tunable dielectric, bismuth zinc niobate (BZN), can be integrated...

  • Effect of annealing on leakage current characteristics of Pt/Ba0.6Sr0.4TiO3/Pt thin-film capacitors. Fusheng Pan; Hongwei Chen; Wei Cai; Chuanren Yang // Journal of Materials Science: Materials in Electronics;Apr2007, Vol. 18 Issue 4, p453 

    Abstract?? The effect of annealing on leakage current characteristics of Pt/Ba0.6Sr0.4TiO3/Pt ferroelectric thin-film capacitors was investigated at the temperature range from 273?K to 393?K. The results show that the depletion layer width of the as-deposited BST film is about 3?5 times greater...

  • High-energy density in aromatic polyurea thin films. Yong Wang; Xin Zhou; Minren Lin; Zhang, Q. M. // Applied Physics Letters;5/18/2009, Vol. 94 Issue 20, p202905 

    This letter investigates dielectric responses of aromatic polyurea thin films fabricated through vapor deposition polymerization. The high quality polymer films exhibit high breakdown field (800 MV/m) and high-energy density (>12 J/cm3) at room temperature. These values decrease slightly from...

  • The characteristics of transparent conducting Al-doped zinc oxide thin films deposited on polymer substrates. Kao, J.; Hsu, C.; Chen, G.; Wen, D. // Journal of Materials Science: Materials in Electronics;Jul2012, Vol. 23 Issue 7, p1352 

    Al-doped zinc oxide (AZO) transparent, conductive thin films were deposited on inexpensive polyethylene terephthalate substrates, using radio frequency (rf) magnetron sputtering, with an AZO ceramic target (the AlO content is approximately 2 wt%). This paper presents an effective method for the...

  • Enhanced mobility of organic thin film transistors by water absorption of collagen hydrolysate gate dielectric. Hsieh, Chao-Ying; Hwang, Jenn-Chang; Chang, Ting-Hao; Li, Jiun-Yi; Chen, Shih-Han; Mao, Lung-Kai; Tsai, Li-Shiuan; Chueh, Yu-Lun; Lyu, Ping-Chiang; Hsu, Shawn S. H. // Applied Physics Letters;7/8/2013, Vol. 103 Issue 2, p023303 

    Collagen hydrolysate is a nature protein, which works well as the gate dielectric for organic thin film transistors (OTFTs). The pentacene OTFTs exhibit a field-effect mobility (μFE) value of 0.8 cm2V-1s-1 and an on/off ratio of 105 in vacuum. The drain current is greatly enhanced and the...

  • Optimization of Metal-Metal Comb-Capacitors for RF Applications. Rajagopalan, Jay; Basit, Haris // Wireless Design & Development;Mar2004, Vol. 12 Issue 3, p34 

    Deals with the optimization of metal-metal comb-capacitors for radio frequency applications. Types of capacitors; Description of metal-metal comb-capacitors; Dimension of metal-metal comb-capacitors.

  • A COMPACT 2.4/5.2-GHZ RAT-RACE COUPLER ON GLASS SUBSTRATE. Wang, S.; Zhong, J.-Y. // Progress in Electromagnetics Research Letters;Jul2011, Vol. 24, p109 

    This paper presents the design and implementation of a compact 2.4/5.2-GHz rat-race coupler on a glass substrate. Due to the low-loss substrate and thick metal layers, the process provides high-Q capacitors and inductors, and therefore the lumped rat-race coupler is practical. The coupler...

  • Heat treatment effects on the metal-polymer interface and space-charge formation in thin metallized polyethylene terephthalate films. Thielen, A.; Hendrick, E.; Niezette, J.; Vanderschueren, J.; Feyder, G. // Journal of Applied Physics;4/15/1994, Vol. 75 Issue 8, p4069 

    Presents information on a study which investigated space-charge formation in polyethylene terephthalate ultrathin films by means of the thermally stimulated polarization current method. Methodology of the study; Results and discussion; Conclusions.


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics