Hollow cathode magnetron ion source with axial extraction. II

Miljevic, Vujo I.
February 1998
Review of Scientific Instruments;Feb1998, Vol. 69 Issue 2, p1054
Academic Journal
Evaluates the hollow cathode magnetron ion source with axial extraction. Dependence of the plasma column on discharge and ion current conditions; Assurance of the needed ion concentration for the ion current; Relationship between the plasma column and extracted ion current.


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