TITLE

Hollow cathode magnetron ion source with axial extraction. II

AUTHOR(S)
Miljevic, Vujo I.
PUB. DATE
February 1998
SOURCE
Review of Scientific Instruments;Feb1998, Vol. 69 Issue 2, p1054
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Evaluates the hollow cathode magnetron ion source with axial extraction. Dependence of the plasma column on discharge and ion current conditions; Assurance of the needed ion concentration for the ion current; Relationship between the plasma column and extracted ion current.
ACCESSION #
4734803

 

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