Ion charge state distribution in plasma of electron cyclotron resonance discharge sustained by powerful millimeter wave radiation

Golubev, S. V.; Zorin, V. G.; Razin, S. V.
February 1998
Review of Scientific Instruments;Feb1998, Vol. 69 Issue 2, p634
Academic Journal
Investigates the ion charge state distribution in the plasma of electron cyclotron resonance discharge. Correlation between the charge state distribution maximum and argon charge; Dependence of multiply charged ion generation efficiency on the gas pressure of microwave radiation; Estimation of ion beam current from the electron beam ion trap.


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