TITLE

Controlled particle transport in a plasma chamber with striped electrode

AUTHOR(S)
Ke Jiang; Yang-fang Li; Shimizu, T.; Konopka, U.; Thomas, H. M.; Morfill, G. E.
PUB. DATE
December 2009
SOURCE
Physics of Plasmas;Dec2009, Vol. 16 Issue 12, p123702
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
The controlled transport of micrometer size dust particles in a parallel-plate radio frequency discharge has been investigated. The lower stainless steel electrode consisted of 100 independently controllable electrical metal stripes. The voltage signals on these stripes were modulated, causing traveling plasma sheath distortions. Because the particles trapped in local potential wells moved according to the direction of the distortion, the transport velocity could be actively controlled by adjusting frequencies and phase shifts of the applied periodic voltage signals. To investigate the detailed principle of this transport, molecular dynamic simulations was performed to reproduce the observations with the plasma background conditions calculated by separated particle-in-cell simulations for the experimental parameters. The findings will help develop novel technologies for investigating large-scale complex plasma systems and techniques for achieving clean environments in plasma processing reactors.
ACCESSION #
47244152

 

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