Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering

Mansour ElSabbagh, M. A.; Bowden, M.D.; Uchino, K.; Muraoka, K.
May 2001
Applied Physics Letters;5/21/2001, Vol. 78 Issue 21, p3187
Academic Journal
Electron energy distribution functions in low-pressure capacitively coupled radio-frequency argon discharges were measured using the technique of laser Thomson scattering. It was found that the distribution functions changed from a bi-Maxwellian at lower pressures to a single Maxwellian at higher pressures. These measurements provide independent confirmation of probe measurements made in similar discharges. The electron temperature and density of the cold group of electrons were measured with an accuracy of better than 10%. © 2001 American Institute of Physics.


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