Dewetting of resist/metal bilayers in resist stripping processes

Wu, Yihong; Qiao, Peiwen; Chong, Towchong; Low, Teck-Seng; Xie, Hong; Luo, Ping; Guo, Zaibing; Qiu, Jinjun
May 2001
Applied Physics Letters;5/21/2001, Vol. 78 Issue 21, p3361
Academic Journal
We report the observations of dewetting of resist/metal bilayers in a resist stripping process of nanofabrication in O[sub 2] plasma. The initiation of the dewetting process is tentatively associated with local heating caused by surface plasmon induced in metallic nanoparticles or nanowires. The surface patterns thus formed differ substantially from all the dewetting patterns reported so far, and they resemble trees at micrometer scale. The possible mechanism for the formation of this kind striking patterns is discussed and its implication to future nanoelectronics manufacturing is addressed. © 2001 American Institute of Physics.


Related Articles

  • Characteristics of C[sub 3] radicals in high-density C[sub 4]F[sub 8] plasmas studied by laser-induced fluorescence spectroscopy. Takizawa, K.; Sasaki, K.; Kadota, K. // Journal of Applied Physics;12/1/2000, Vol. 88 Issue 11, p6201 

    Spatial and temporal variations of C[sub 3] density in high-density octafluorocyclobutane (c-C[sub 4]F[sub 8]) plasmas were examined using laser-induced fluorescence spectroscopy. The C[sub 3] density varied slowly for a long time after the initiation of discharge, suggesting the importance of...

  • Microplasma: A New Generation of Technology for Functional Nanomaterial Synthesis. Lin, Liangliang; Wang, Qi // Plasma Chemistry & Plasma Processing;Nov2015, Vol. 35 Issue 6, p925 

    Plasma technology has been widely applied in the ozone production, material modification, gas/water cleaning, etc. Various nanomaterials were produced by thermal plasma technology. However, the high temperature process and low uniformity products limit their application for the high value added...

  • Reactor design considerations in the hot filament/direct current plasma synthesis of carbon nanofibers. Cruden, Brett A.; Cassell, Alan M.; Qi Ye, Alan M.; Meyyappan, M. // Journal of Applied Physics;9/15/2003, Vol. 94 Issue 6, p4070 

    Explores a combined hot filament/direct current plasma approach to chemical vapor deposition of carbon nanofibers (CNF) using an acetylene/ammonia feedstock. Impact of filament usage and substrate holder design; Demonstration that the filament wire is important primarily in the pretreatment of...

  • Recent developments on WC-based bulk composites. Mukhopadhyay, Amartya; Basu, Bikramjit // Journal of Materials Science;Feb2011, Vol. 46 Issue 3, p571 

    In order to achieve improved properties and performance with WC-based cemented carbides, research efforts have been directed towards the development of nanostructured cemented carbides. With the recent development of 'spray conversion process' for synthesizing nanosized powders and the advent of...

  • Flourine plasma chemistry for high-AR dielectric etching. Bing Ji; Motika, Stephen A.; Badowski, Peter R.; Dheandhanoo, Seksan; Stets, James R.; Karwacki, Eugene J. // Solid State Technology;Nov2005, Vol. 48 Issue 11, p45 

    The article discusses fluorine plasma chemistry for high-anisotropic dielectric etching. Dielectric etching becomes more critical and stringent with the adoption of dual-damascene copper interconnect fabrication. This fabrication requires etching the dielectric material rather than the metal. At...

  • Microplasma generated at solid–solid interface and its application to nanostructure formation. Nakamura, D.; Nishimura, J.; Okada, T. // Applied Physics A: Materials Science & Processing;Sep2008, Vol. 92 Issue 4, p813 

    The dynamics of the microplasmas created at a transparent solid–solid interface were investigated extensively. Microplasmas were generated at an interface between a carbon (C) or a germanium (Ge) target and a SiO2 substrate by irradiating a KrF excimer laser beam onto the target, and the...

  • Catalytic properties of Ni-Al intermetallic nanoparticles fabricated by thermal plasma process. Ya Xu; Junyou Yang; Masahiko Demura; Toshiyuki Hirano; Yoshitaka Matsushita; Masahiko Tanaka; Yoshio Katsuya // Materials Science Forum;2014, Vol. 783-786, p2040 

    The catalytic activity of Ni-Al (Ni25Al) nanoparticles fabricated by thermal plasma evaporation was examined for methanol decomposition and CO oxidation. The nanoparticles exhibited high activity for both reactions. Characterization of the nanoparticles revealed that the fabricated nanoparticles...

  • High-speed surface temperature measurements on plasma facing materials for fusion applications. Araki, Masanori; Kobayashi, Masanobu // Review of Scientific Instruments;Jan1996, Vol. 67 Issue 1, p178 

    Discusses the development of an high-speed infrared thermometer to investigate the surface behavior and temperature responses of plasma facing materials used in fusion applications. Conduct of high heat flux beam irradiation experiments; Analysis of surface temperatures measured with the...

  • Wavelength tuning of surface plasmon resonance using dielectric layers on silver island films. Xu, G.; Tazawa, M.; Jin, P.; Nakao, S.; Yoshimura, K. // Applied Physics Letters;6/2/2003, Vol. 82 Issue 22, p3811 

    A simple and effective method was demonstrated to tune surface plasmon resonance (SPR) wavelength of silver island films by introducing a dielectric medium to vary interisland dielectric constant. The medium, either overcoating or sandwiching the silver islands, can make a dramatic effect on the...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics