Natural oxides on air-exposed and chemically treated InGaP surfaces grown by metalorganic vapor phase epitaxy

Hashizume, Tamotsu; Saitoh, Toshiya
April 2001
Applied Physics Letters;4/16/2001, Vol. 78 Issue 16, p2318
Academic Journal
Chemical properties of natural oxides on air-exposed and chemically treated In[sub 0.49]Ga[sub 0.51]P surfaces grown by metalorganic vapor phase epitaxy were systematically investigated by x-ray photoelectron spectroscopy. An air-exposed sample exhibited a highly In-rich surface which included a large amount of natural oxides. From the valence-band spectra and energy separations between core levels, it was found that the InPO[sub 4]-like chemical phase was dominant in natural oxides of air-exposed InGaP surfaces. Chemical surface treatments in HCl and HF solutions were effective in reducing natural oxide and in recovering the surface stoichiometry. © 2001 American Institute of Physics.


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