High-frequency eddy-current technique for thickness measurement of micron-thick conducting layers

Sakran, F.; Golosovsky, M.; Goldberger, H.; Davidov, D.; Frenkel, A.
March 2001
Applied Physics Letters;3/12/2001, Vol. 78 Issue 11, p1634
Academic Journal
We demonstrate a reflection-mode eddy-current technique operating in the 100 MHz to 5 GHz range. It allows contactless measurement of the thickness of conducting layers (Ag, Al, Cu, W, etc.) 0.1-1 μm thick with the spatial resolution of 1-2 mm. © 2001 American Institute of Physics.


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