TITLE

Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition

AUTHOR(S)
Cui, H.; Zhou, O.; Stoner, B. R.
PUB. DATE
November 2000
SOURCE
Journal of Applied Physics;11/15/2000, Vol. 88 Issue 10
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Aligned multiwall carbon nanotubes have been grown on silicon substrates by microwave plasma enhanced chemical vapor deposition using methane/ammonia mixtures. Scanning electron microscopy shows that the nanotubes are well aligned with high aspect ratio and growth direction normal to the substrate. Transmission electron microscopy reveals that the majority phase has a bamboo-like structure. Data are also presented showing process variable effects on the size and microstructure of the aligned nanotubes, giving insight into possible nucleation and growth mechanisms for the process. © 2000 American Institute of Physics.
ACCESSION #
4713362

 

Related Articles

  • Textured diamond growth on (100) beta-SiC via microwave plasma chemical vapor deposition. Stoner, B.R.; Glass, J.T. // Applied Physics Letters;2/10/1992, Vol. 60 Issue 6, p698 

    Examines the textured diamond growth of beta-silicon carbide (SiC) via microwave plasma chemical vapor deposition preceded by a pretreatment enhancing nucleation. Role of biasing pretreatment on SiC in enhancing the nucleation; Advantages of using the biasing process; Effects of the amorphous...

  • Dielectric function of V[sub 2]O[sub 5] nanocrystalline films by spectroscopic ellipsometry: Characterization of microstructure. Losurdo, Maria; Bruno, Giovanni; Barreca, Davide; Tondello, Eugenio // Applied Physics Letters;8/21/2000, Vol. 77 Issue 8 

    Spectroscopic ellipsometry over the photon energy 1.5-5.0 eV is used to derive the dielectric function of V[sub 2]O[sub 5] nanocrystalline films deposited by plasma-enhanced chemical vapor deposition. The dispersion in the optical response is described by a combination of Lorentzian oscillators....

  • Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures. Melechko, A. V.; McKnight, T. E.; Guillorn, M. A.; Merkulov, V. I.; Ilic, B.; Doktycz, M. J.; Lowndes, D. H.; Simpson, M. L. // Applied Physics Letters;2/10/2003, Vol. 82 Issue 6, p976 

    We report a method to fabricate nanoscale pipes ("nanopipes") suitable for fluidic transport. Vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition are used as sacrificial templates for nanopipes with internal diameters as small as 30 nm and lengths up to...

  • Threshold sheath potential for the nucleation and growth of cubic boron nitride by inductively.... Amagi, Satoshi; Takahashi, Daisuke // Applied Physics Letters;2/24/1997, Vol. 70 Issue 8, p946 

    Examines the nucleation and growth conditions of cubic boron nitride films in low-pressure inductively coupled plasma enhanced chemical vapor deposition. Regulation of threshold sheath potentials for film nucleation and growth; Ion bombardment threshold energy for the nitride formation; Values...

  • Excitation mechanism and thermal emission quenching of Tb ions in silicon rich silicon oxide thin films grown by plasma-enhanced chemical vapour deposition—Do we need silicon nanoclusters? Podhorodecki, A.; Golacki, L. W.; Zatryb, G.; Misiewicz, J.; Wang, J.; Jadwisienczak, W.; Fedus, K.; Wojcik, J.; Wilson, P. R. J.; Mascher, P. // Journal of Applied Physics;2014, Vol. 115 Issue 14, p143510-1 

    In this work, we will discuss the excitation and emission properties of Tb ions in a Silicon Rich Silicon Oxide (SRSO) matrix obtained at different technological conditions. By means of electron cyclotron resonance plasma-enhanced chemical vapour deposition, undoped and doped SRSO films have...

  • Carbon Nanomaterials for Optical Absorber Applications. Kaul, Anupama; Coles, James; Megerian, Krikor; Eastwood, Michael; Green, Robert; Pagano, Thomas; Bandaru, Prabhakar; Dokmeci, Mehmet // Sensors & Transducers (1726-5479);Dec2011 Supplement, p109 

    Optical absorbers based on vertically aligned multi-walled carbon nanotubes (MWCNTs), synthesized using electric-field assisted growth, are described here that show an ultra-low reflectance, 100X lower compared to the benchmark, a diffuse metal black- Au-black - from wavelength λ∼350 nm...

  • Facet dependent reactivity and selective deposition of nanometer sized β-SiC on diamond surfaces. Jiang, X.; Srikanth, V. V. S. S.; Zhao, Y. L.; Zhang, R. Q. // Applied Physics Letters;6/16/2008, Vol. 92 Issue 24, p243107 

    Selective deposition of nano-β-SiC on non-{100} diamond faces has been observed in a microwave plasma chemical vapor deposition process due to the presence of Si(CH3)4 in the gas phase. The process allows only the growth of diamond starting crystals whose [001] is normal to the film surface...

  • Influence of deposition parameters on the composition and structure of reactively sputtered nanocomposite TaC/a-C:H thin films. Evans, Ryan D.; Howe, Jane Y.; Bentley, James; Doll, Gary L.; Glass, Jeffrey T. // Journal of Materials Research;Sep2005, Vol. 20 Issue 9, p2583 

    The properties of nanocomposite tantalum carbide/amorphous hydrocarbon (TaC/a-C:H) thin films depend closely on reactive magnetron sputtering deposition process conditions. The chemical composition and structure trends for TaC/a-C:H films were obtained as a function of three deposition...

  • Carbon Nanofibers Get New Respect. Yoong, Hans; Jabbar, Taha // R&D Magazine;Dec2005, Vol. 47 Issue 12, p21 

    The article discusses the use of carbon nanofibers as interconnect structures in integrated circuits. Nanofibers have specific tensile strength, the ability for ballistic electron transport and structural elegance. Fabrication of nanofibers is done through catalytically medicated plasma-enhanced...

Share

Read the Article

Courtesy of NEW JERSEY STATE LIBRARY

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics