Fabrication of <5 nm width lines in poly(methylmethacrylate) resist using a water:isopropyl alcohol developer and ultrasonically-assisted development

Yasin, Shazia; Hasko, D. G.; Ahmed, H.
April 2001
Applied Physics Letters;4/30/2001, Vol. 78 Issue 18, p2760
Academic Journal
We report on the fabrication of 3-4 nm wide continuous lines in a positive tone electron beam resist poly(methylmethacrylate) on a solid substrate. This narrow linewidth was made possible through the use of a nonsolvent-based developer system, water:isopropyl alcohol, together with ultrasonically-assisted development, which reduced the effective development time thus limiting the swelling of the unexposed resist. This combination of solvent system and development technique results in a smaller radius of gyration in the developing polymer molecules and in a wider exposure dose latitude compared to conventional processing and so allows ultrasmall features to be reproduced. © 2001 American Institute of Physics.


Related Articles

  • Polymeric waveguide wavelength filters using electron-beam direct writing. Wong, W. H.; Pun, E. Y. B. // Applied Physics Letters;11/26/2001, Vol. 79 Issue 22, p3576 

    Polymeric waveguide wavelength filters based on a low-loss negative tone epoxy Novolak resin polymer have been fabricated using electron-beam direct writing. Both the waveguides and the gratings were exposed simultaneously, which effectively eliminate the alignment errors that can be generated...

  • Low-voltage electron beam lithography with a scanning tunneling microscope. Marrian, C. R. K.; Colton, R. J. // Applied Physics Letters;2/19/1990, Vol. 56 Issue 8, p755 

    Studies of a polydiacetylene negative electron beam resist have been made in a scanning tunneling microscope operated in vacuum at pressures in the 10-8 Torr range. The resist can be imaged if it is applied as a thin film to a conductive flat substrate and the tip bias voltage is chosen...

  • Electron beam induced coalescence in plasma polymer silver composite films. Werner, Jens; Heilmann, Andreas // Applied Physics Letters;6/19/1995, Vol. 66 Issue 25, p3436 

    Presents an electron beam induced coalescence in plasma polymer silver thin films. Characterization of the microstructure; Utilization of transmission electron microscopy in the study; Limitation of the changes of the microstructure following electron beam irradiation.

  • Selective poling of nonlinear optical polymer films by means of a monoenergetic electron beam. Yang, G.-M.; Bauer-Gogonea, S.; Sessler, G.M.; Bauer, S.; Ren, W.; Wirges, W.; Gerhard-Multhaupt, R. // Applied Physics Letters;1/3/1994, Vol. 64 Issue 1, p22 

    Employs electron beams for selective poling of nonlinear optical polymer thin films. Examination of the resulting dipole orientation; Nonuniform charge and polarization profiles; Concept of nonlinear optical frequency conversion.

  • Inelastic scattering of electron and light ion beams in organic polymers. de Vera, Pablo; Abril, Isabel; Garcia-Molina, Rafael // Journal of Applied Physics;May2011, Vol. 109 Issue 9, p094901 

    We have calculated the inelastic mean free path, stopping power, and energy-loss straggling of swift electron, proton, and α-particle beams in a broad incident energy range in four organic polymers: poly(methyl methacrylate) (PMMA), Kapton, polyacetylene (PA), and poly(2-vinylpyridine)...

  • Electron-beam charging of polytetrafluoroethylene. Sadovnichii, D. N.; Tuytnev, A. P.; Milekhin, Yu. M. // High Energy Chemistry;Nov2008, Vol. 42 Issue 6, p435 

    The charging of polytetrafluoroethylene films by irradiation with fast electrons having an energy insufficient for the complete penetration through the entire thickness of the polymer was theoretically analyzed. The calculation results take into account the distribution of both the dose rate and...

  • Electron Beam Influence on Microcrystalline Cellulose. NemŢanu, Monica R.; Minea, R.; Mitru, Ecaterina // AIP Conference Proceedings;2007, Vol. 899 Issue 1, p791 

    Cellulose is a natural raw material used in great quantity as stabilizer, tabletting agent, anti-caking agent, flavor carrier, etc. Due to its structure it has limited uses exhibiting some disadvantages in certain applications. Irradiation technique is frequently used to change the polymeric...

  • The expanding role of SHRINK TUBING. Shafir, Sofia // Machine Design;12/8/2005, Vol. 77 Issue 23, p96 

    The article details the process involved in manufacturing heat-shrinkable tubing materials. It starts by extruding organic polymer material as tube. When the tube is exposed to a high-energy electron beam, it creates additional bonds in the molecular chains making up the polymer. The extruded...

  • Electron-Beam Irradiation of Halogen Free Flame Retardant Polymers for Wire and Cable Applications. Sabet, Maziyar; Soleimani, Hassan // Applied Mechanics & Materials;2014, Issue 625, p29 

    Effect of addition different polymers and fillers with electron beam irradiation on changes of physical, electrical and flammability properties of low density polyethylene (LDPE) / trimethylol propane trimethylacrylate (TMPTMA) / Irganox/ zinc borate (ZB) have been investigated. Results of...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics