Low-voltage electron emission from "tipless" field emitter arrays

Busta, H.; Furst, D.; Rakhimov, A. T.; Samorodov, V. A.; Seleznev, B. V.; Suetin, N. V.; Silzars, A.
May 2001
Applied Physics Letters;5/28/2001, Vol. 78 Issue 22, p3418
Academic Journal
Electron emission is obtained from "tipless" gated n-silicon arrays (6460 gate holes) by depositing about 10 nm of nanocrystalline graphite (NCG) on top of the gates and into the gate holes by a glow-discharge technique at 900 °C. The polycrystalline silicon gate diameter is 1.8 μm and the gate-to-substrate distance is 0.85 μm. The interdielectric layer is SiO[sub 2]. Turn-on voltages are about 40-60 V. The gate currents are about 50% of the total emission currents. From the emission site density of the NCG films and current fluctuation measurements, it is concluded that several emission sites are generated inside the gate holes at the NCG-Si interface that exhibit gate voltage (V[sub g]) -induced field enhancement. The field at these emission sites is expressed by E=βV[sub g]. © 2001 American Institute of Physics.


Related Articles

  • Breakdown voltage reliability improvement in gas-discharge tube surge protectors employing graphite field emitters. Zˇumer, Marko; Zajec, Bojan; Rozman, Robert; Nemanicˇ, Vincenc // Journal of Applied Physics;Apr2012, Vol. 111 Issue 8, p083301 

    Gas-discharge tube (GDT) surge protectors are known for many decades as passive units used in low-voltage telecom networks for protection of electrical components from transient over-voltages (discharging) such as lightning. Unreliability of the mean turn-on DC breakdown voltage and the...

  • Electron Beam Formation in an Open Discharge. Sorokin, A. R. // Technical Physics Letters;Dec2000, Vol. 26 Issue 12, p1114 

    The results of calculations reported for the first time indicate that the electron emission from a cathode, which is necessary to explain the main properties of an open discharge, is stimulated by the cathode bombardment by fast atoms rather than by photons (as was believed for a long time). The...

  • Electrical test method using high density plasmas for high-end printed circuit boards. Oh, Se-Jin; Kim, Young-Cheol; Chung, Chin-Wook // Review of Scientific Instruments;Jan2012, Vol. 83 Issue 1, p013503 

    A novel electrical test method that uses high-density plasmas, such as inductively coupled discharges, is proposed to detect open/short failures of high-end printed circuit boards (PCBs). The PCB is inserted into the plasma chamber with the top side facing the plasma sheath, and the bottom of...

  • Xenon excimer emission from pulsed microhollow cathode discharges. Moselhy, M.; Shi, W.; Stark, R. H.; Schoenbach, K. H. // Applied Physics Letters;8/27/2001, Vol. 79 Issue 9, p1240 

    By applying electrical pulses of 20 ns duration to xenon microplasmas, generated by direct current microhollow cathode discharges, we were able to increase the xenon excimer emission by more than an order of magnitude over direct current discharge excimer emission. For pulsed voltages in excess...

  • Gas-Filled Electron Diode Based on a Glow Discharge. Devyatkov, V. N.; Koval, N. N.; Schanin, P. M. // Technical Physics;May2001, Vol. 46 Issue 5, p524 

    Stable ignition and sustention of a pulsed discharge with a current of up to 180 A and duration of 12 μs at a pressure of 10[sup -1]-10[sup -2] Pa are achieved in a glow-discharge plasma cathode with the help of an auxiliary initiating discharge. An electron emission current density of up to...

  • High-Efficiency Electron Beam Generation in an Open Discharge without Anode Grid. Bokhan, P. A.; Zakrevsky, D. E. // Technical Physics Letters;Jan2002, Vol. 28 Issue 1, p73 

    The open discharge of a new type characterized by the continuous electron beam generation efficiency practically exceeding 98% is demonstrated for the first time. The conditions of discharge functioning were determined and the discharge current-voltage characteristics are measured. The results...

  • Electron heating in low-pressure rf glow discharges. Surendra, M.; Graves, D. B.; Morey, I. J. // Applied Physics Letters;3/12/1990, Vol. 56 Issue 11, p1022 

    Particle-in-cell simulations of radio frequency glow discharges between parallel-plate electrodes were performed to test the role of secondary emission at applied frequencies above the ion plasma frequency. With the secondary electron emission coefficient set to zero, the high-energy tail of the...

  • Electron emission from glow-discharge cathode materials due to neon and argon ion bombardment. Szapiro, B.; Rocca, J. J. // Journal of Applied Physics;5/1/1989, Vol. 65 Issue 9, p3713 

    Presents information on a study which measured the electron yields of several glow-discharge materials under bombardment by neon and argon ions. Methodology of the study; Results of the study; Implications of the study.

  • Atomic-dipole-moment induced local surface potential on Si(111)-(7×7) surface studied by non-contact scanning nonlinear dielectric microscopy. Kohei Yamasue; Masayuki Abe; Yoshiaki Sugimoto; Yasuo Cho // Applied Physics Letters;9/22/2014, Vol. 105 Issue 12, p1 

    We have performed the site-specific, quantitative measurement of a local surface potential induced by atomic dipoles on a Si(111)-(7×7) surface by non-contact scanning nonlinear dielectric microscopy (NC-SNDM) combined with an atom-tracking technique. The measured potentials were...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics