Identification of ternary boron-carbon-nitrogen hexagonal phases by x-ray absorption spectroscopy

Gago, R.; Jiménez, I.; Albella, J. M.; Terminello, L. J.
May 2001
Applied Physics Letters;5/28/2001, Vol. 78 Issue 22, p3430
Academic Journal
Boron carbon nitride (BCN) films have been grown by B[sub 4]C evaporation with concurrent N[sub 2][sup +] ion assistance, and have been characterized by x-ray absorption near edge (XANES) spectroscopy. Upon the nitrogen insertion, the film structure evolves from B[sub x]C-like to h-BN-like. The hexagonal structure corresponds to a true ternary BCN compound that can be understood as h-BN with carbon incorporated in substitutional sites. The C(1s)XANES presents π* states characteristic of the BCN arrangement. The basal planes of the h-BCN phase are oriented perpendicular to the substrate, as derived from the angle dependence of the XANES signal. © 2001 American Institute of Physics.


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