Origin of the domain contrast on a Si(001)-2x1 surface imaged by secondary electrons

Watanabe, Heiji; Ichikawa, Masakazu; Kawamura, Takaaki
February 2001
Applied Physics Letters;2/26/2001, Vol. 78 Issue 9, p1255
Academic Journal
Secondary electron (SE) imaging of alternating domains on Si(001)-2x1 surfaces was studied. We experimentally investigated the relationship between the domain contrast and the incident electron-beam angles, and found that the domain contrast between alternating 2x1 terraces is reversed by changing the incident-beam-angle conditions. And we theoretically show that the intensity of electron waves near the surface changes drastically and reverses according to the incident beam conditions. Both these experimental and theoretical results indicate that the domain contrast in SE images does not originate from anisotropic SE emission from the reconstructed surface but from the difference between the SE excitation on the 2x1 terrace and that on the 1x2 terrace. © 2001 American Institute of Physics.


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