Improved dielectric properties of lead zirconate titanate thin films deposited on metal foils with LaNiO[sub 3] buffer layers

Zou, Q.; Ruda, H. E.; Yacobi, B. G.
February 2001
Applied Physics Letters;2/26/2001, Vol. 78 Issue 9, p1282
Academic Journal
Improved dielectric properties of lead zirconate titanate (PZT) films deposited on a variety of foils using buffer layers are reported. Foils include titanium, stainless steel, and nickel with LaNiO[sub 3](LNO) buffer layers which were prepared by sol-gel processing. High dielectric constant (330 for stainless steel, 420 for titanium, and 450 for nickel foils), low dielectric loss (<2.2% for titanium and 8% for stainless steel), symmetric ferroelectric C-V characteristics and P-E curves were obtained. The LNO layers are shown to provide an effective diffusion barrier for Ni and Cr and to restrict oxide layer formation (i.e., TiO[sub x] or NiO[sub x]) between the PZT film and the metallic foils during annealing in air. © 2001 American Institute of Physics.


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