TITLE

High spatial resolution subsurface microscopy

AUTHOR(S)
Ippolito, S. B.; Goldberg, B. B.; Ünlü, M. S.
PUB. DATE
June 2001
SOURCE
Applied Physics Letters;6/25/2001, Vol. 78 Issue 26, p4071
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We present a high-spatial-resolution subsurface microscopy technique that significantly increases the numerical aperture of a microscope without introducing an additional spherical aberration. Consequently, the diffraction-limited spatial resolution is improved beyond the limit of standard subsurface microscopy. By realizing a numerical aperture of 3.4, we experimentally demonstrate a lateral spatial resolution of better than 0.23 μm in subsurface inspection of Si integrated circuits at near infrared wavelengths. © 2001 American Institute of Physics.
ACCESSION #
4711098

 

Related Articles

  • UMC Bolsters 90nm Yield with Synopsys Technology.  // Electronic News;12/27/2004, Vol. 50 Issue 52, pN.PAG 

    Reports on the incorporation of an alternating aperture phase-shift mask (AA-PSM) technology from Synopsis Inc. in the enhancement of the 90 nanometer process for integrated circuits of United Microelectronics Corp., a Hsinchu, Taiwan-based foundry. Features of the AA-PSM technology; Background...

  • Single-molecule 'scope. Lerner, Eric J. // Industrial Physicist;Oct2000, Vol. 6 Issue 5, p8 

    Presents a possible means in the attainment of nanometer-resolution optical microscopy in Konstanz, Germany. Advantages of optical microscopy for researchers to improve resolution; Discussion of near-field scanning microscopy; Problems in the construction of smaller apertures and the finiteness...

  • Tailoring a high-transmission fiber probe for photon scanning tunneling microscope. Saiki, T.; Mononobe, S. // Applied Physics Letters;5/6/1996, Vol. 68 Issue 19, p2612 

    Examines the transmission efficiency of a fiber probe used in photon scanning tunneling microscope as an aperture diameter function. Fabrication of the apertured probe by chemical etching and metal coating; Comparison of probes with different angles; Use of the microscope for the...

  • Near-field infrared microscopy with a transient photoinduced aperture. Simanovskii, D.; Palanker, D.; Cohn, K.; Smith, T. // Applied Physics Letters;8/20/2001, Vol. 79 Issue 8, p1214 

    We report a method of near-field infrared microscopy with a transient optically induced probe. Photoinduced reflectivity in semiconductors is used to generate a relatively large transient mirror with a small aperture (infrared probe) in its center. Properties of this probe have been studied and...

  • GaN Power Amplifiers: Results and Prospective. Giofrè, Rocco; Piazzon, Luca; Colantonio, Paolo; Cipriani, Elisa; Giannini, Franco // International Journal of Microwave & Optical Technology;Jan2014, Vol. 9 Issue 1, p13 

    This article is focused on GaN-based power amplifiers for applications up to 10 GHz. Several PAs developed in both MMIC and hybrid technologies for different RF and microwave frequency bands will be described. In particular, the designs of two ultra-wideband (UWB) PAs are reported together with...

  • High throughput aperture near-field scanning optical microscopy. Minh, Phan Ngoc; Phan Ngoc Minh; Ono, Takahito; Esashi, Masayoshi // Review of Scientific Instruments;Aug2000, Vol. 71 Issue 8 

    This article presents a simple measurement setup for characterization of a combined near-field scanning optical and atomic force microscopy (NSOM/AFM) using an aperture Si based probe. A technological approach has been found for the fabrication of a miniature aperture at the apex of a SiO[sub 2]...

  • APPLICATION OF AN AUTOFOCUSING ALGORITHM FOR SAR IMAGE QUALITY IMPROVEMENT AND APPLICATION OF THE MODIFIED FRACTAL SIGNATURE (MFS) METHOD FOR SAR IMAGE CLASSIFICATION FOR THE CASE OF REAL RADAR DATA. Malamou, A.; Pandis, C.; Karakasiliotis, A.; Stefaneas, P.; Kodokostas, D.; Frangos, P. // Journal of Applied Electromagnetism;2014, Vol. 16 Issue 1, p46 

    In the first part of this paper, the application of an autofocusing algorithm is presented for the case of real field radar data, provided to us by SET 163 Working Group. This algorithm is named 'CPI-split-algorithm', where CPI stands for 'Coherent Processing Interval'. Numerical results...

  • Subwavelength-sized aperture fabrication in aluminum by a self-terminated corrosion process in the evanescent field. Haefliger, D.; Stemmer, A. // Applied Physics Letters;5/6/2002, Vol. 80 Issue 18, p3397 

    We present a simple, one-step process to fabricate apertures of high quality for scanning near-field optical microscope probes based on aluminum-coated silicon-nitride cantilevers. An evanescent optical field at the glass—water interface is used to heat up the aluminum at the tip apex due...

  • Near-field optical beam induced current measurements on heterostructures. Unlu, M.S.; Goldberg, B.B. // Applied Physics Letters;9/25/1995, Vol. 67 Issue 13, p1862 

    Focuses on the use of near field optical beam induced current (NOBIC) measurements on semiconductor diodes with quantum well structures. Structure of NOBIC imaging; Study on wavelength dependence and resolution capability of NOBIC; Importance of aperture size.

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics