TITLE

Silicon microdischarge devices having inverted pyramidal cathodes: Fabrication and performance of arrays

AUTHOR(S)
Park, S.-J.; Chen, J.; Liu, C.; Eden, J. G.
PUB. DATE
January 2001
SOURCE
Applied Physics Letters;1/22/2001, Vol. 78 Issue 4, p419
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Microdischarge devices having inverted, square pyramidal cathodes as small as 50 μm x 50 μm at the base and 35 μm in depth, have been fabricated in silicon and operated at gas pressures up to 1200 Torr. For the polyimide dielectric incorporated into these devices (ε[sub r]=2.9), the discharges produced exhibit high differential resistance (∼2 x 10[sup 8] Ω in Ne), ignition voltages for a single device of ∼260-290 V, and currents typically in the μA range. Arrays as large as 10 x 10 have been fabricated. For an 8 μm thick polyimide dielectric layer, operating voltages as low as 200 V for a 5 x 5 array have been measured for 700 Torr of Ne. Array lifetimes are presently limited to several hours by the thin (1200-2000 Å) Ni anode.
ACCESSION #
4710974

 

Related Articles

  • On the use of MHD mode analysis as a technique for determination of q-profiles in JET plasmas. Nave, M. F. F.; Borba, D.; Galvão, R.; Hacquin, S.; Alper, B.; Challis, C.; Gerasimov, S.; Hawkes, N.; Mailloux, J.; Sharapov, S.; Boswell, C.; Brix, M.; Joffrin, E.; de la Luna, E.; Smeulders, P. // Review of Scientific Instruments;Oct2004 Part I & II, Vol. 75 Issue 10, p4274 

    JET plasmas show fluctuations from a large variety of MHD instabilities. A combination of spectral analysis, mode number analysis, and determination of mode radial position has the potential as a diagnostic for the plasma q profile. Mode frequencies and mode numbers are obtained from spectral...

  • Polychromator for the edge Thomson scattering system in ITER. Yatsuka, E.; Hatae, T.; Fujie, D.; Kurokawa, A.; Kusama, Y. // Review of Scientific Instruments;Oct2012, Vol. 83 Issue 10, p10E328 

    A new type polychromator has been designed for the edge Thomson scattering system in ITER. Signal light is parallelly dispersed into two parts at the first interference filter. Spectral transmissivities for some spectral channels may enhance better than the conventional type polychromator. In...

  • Optical instrumentation benefits from software development. Gregory, G. Groot // Laser Focus World;Sept94, Vol. 30 Issue 9, pS9 

    Reveals the parts of a computer-controlled instrument and points out the advantages of using such a system, while noting that whereas computers previously were used to control devices, they are increasingly being used to communicate with as well. What the instrument contains; Most important...

  • New products.  // Laser Focus World;Feb95, Vol. 31 Issue 2, p129 

    Features various optical instruments. Lens-processing system; Atomic-force microscope; Dual-speed digital camera.

  • Silicon devices impact diverse application areas. R.B.; A.L. // Laser Focus World;Apr95, Vol. 31 Issue 4, p98 

    Reports on the applications of silicon-based guided-wave optical devices. Use in communication systems; Hybridization techniques; Optical waveguide sensors.

  • Integrated devices make an optical bench on a chip. Wu, Ming C.; Lin, L.Y. // Laser Focus World;Feb96, Vol. 32 Issue 2, p64 

    Discusses the development of free-space integrated optical systems. Potential applicability of the systems in optical interconnection, image processing, sensing, display and data storage systems; Inadequacy of methods used in building conventional optical systems; Challenges in developing a...

  • Complex designs demand optical engineering code. Garcia, Kevin // Laser Focus World;Aug96, Vol. 32 Issue 8, pS5 

    Explains how optical design software can be used for complex, nontraditional applications. Imaging and non-imaging systems; Modeling systems and sources; Ray tracing and analysis.

  • Mirror, mirror on a pin.  // R&D Magazine;Apr98, Vol. 40 Issue 5, p9 

    Reports on the development of micro-mirrors which simultaneously transmit individual wavelengths of light on optical fiber. Who developed the devices.

  • ORIGAMI OPTICS. Mika, Eric // Popular Science;May2007, Vol. 270 Issue 5, p43 

    This article explains how researchers at the University of California at San Diego have used reflective mirrored technology, borrowed from telescopes, to ensure better zoom lens capability in cellphones, without robbing them of their sleek design. Professor Joseph Ford and graduate student Eric...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics