Sb-doped SrTiO[sub 3] transparent semiconductor thin films

Wang, H. H.; Chen, F.; Dai, S. Y.; Zhao, T.; Lu, H. B.; Cui, D. F.; Zhou, Y. L.; Chen, Z. H.; Yang, G. Z.
March 2001
Applied Physics Letters;3/19/2001, Vol. 78 Issue 12, p1676
Academic Journal
Optically transparent Sb-doped SrTiO[sub 3] thin films with a transmittance higher than 95% in most of the visible region have been grown on SrTiO[sub 3] (001) substrate by pulsed laser deposition. The films behave as an n-type semiconductor between 10 K and room temperature. The carrier concentration and mobility of the films at room temperature are ∼5.8x10[sup 17] cm[sup -3] and ∼6.4 cm[sup 2]/V s, respectively. X-ray photoelectron spectroscopy measurement reveals that the delocalized electrons from the Sb dopants give rise to deep impurity levels within the band gap of the parent compound, which are responsible for the electrical conduction observed. The wide band gap and low density of states in the conduction band account for transparency of the films. © 2001 American Institute of Physics.


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