Probing radicals in hot wire decomposition of silane using single photon ionization

Duan, H. L.; Zaharias, G. A.; Bent, Stacey F.
March 2001
Applied Physics Letters;3/19/2001, Vol. 78 Issue 12, p1784
Academic Journal
Radicals produced by the hot wire-induced decomposition of silane have been identified using vacuum ultraviolet single photon ionization (SPI). This laser-based technique uses 118 nm photons (10.5 eV) to ionize gas phase species; the resulting photoions are detected using time-of-flight mass spectrometry. The major silicon-containing gas-phase species identified by SPI during hot-wire activation of silane gas are Si, SiH[sub 3], and Si[sub 2]H[sub 6]. These results demonstrate that single photon ionization can be a powerful probe for in situ, real-time detection of multiple species in hot wire chemical vapor deposition. © 2001 American Institute of Physics.


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