TITLE

Parallel atomic force microscopy with optical interferometric detection

AUTHOR(S)
Sulchek, T.; Grow, R. J.; Yaralioglu, G. G.; Minne, S. C.; Quate, C. F.; Manalis, S. R.; Kiraz, A.; Aydine, A.; Atalar, A.
PUB. DATE
March 2001
SOURCE
Applied Physics Letters;3/19/2001, Vol. 78 Issue 12, p1787
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We have developed an atomic force microscope that uses interferometry for parallel readout of a cantilever array. Each cantilever contains a phase sensitive diffraction grating consisting of a reference and movable set of interdigitated fingers. As a force is applied to the tip, the movable set is displaced and the intensity of the diffracted orders is altered. The order intensity from each cantilever is measured with a custom array of silicon photodiodes with integrated complementary metal-oxide-semiconductor amplifiers. We present images from five cantilevers acquired in the constant height mode that reveal surface features 2 nm in height. The interdigital method for cantilever array readout is scalable, provides angstrom resolution, and is potentially simpler to implement than other methods. © 2001 American Institute of Physics.
ACCESSION #
4710874

 

Related Articles

  • Frequency stabilization of a multimode high-power He-Ne laser. Yokoyama, Shuko; Araki, Tsutomu; Oshio, Takanori; Suzuki, Norihito // Review of Scientific Instruments;Oct93, Vol. 64 Issue 10, p2796 

    A high-power, frequency-stabilized laser source is required for an atomic force microscope which uses interferometric techniques to obtain distance measurements with picometer resolution. For this purpose, the oscillation frequency of a 10 mW multimode He-Ne laser was stabilized using a new...

  • Height calibration of optical lever atomic force microscopes by simple laser interferometry. Jaschke, Manfred; Butt, Hans-Jurgen // Review of Scientific Instruments;Feb1995, Vol. 66 Issue 2, p1258 

    Presents an interferometric method for height calibration of atomic force microscope (AFM) piezo scanners. Calculation of the optical path difference; Investigations on the piezo response; Oscillations in the noncontact regime of force curves.

  • Spring constant tuning of active atomic force microscope probes using electrostatic spring softening effect. Torun, H.; Sarangapani, K. K.; Degertekin, F. L. // Applied Physics Letters;12/17/2007, Vol. 91 Issue 25, p253113 

    The authors describe a method to electrically adjust the spring constant of an active atomic force microscopy (AFM) probe using electrostatic spring softening effect. The probe consists of a clamped membrane with interferometric displacement sensing and integrated electrostatic actuation. Using...

  • Modeling, design, and analysis of interferometric cantilevers for time-resolved force measurements in tapping-mode atomic force microscopy. Sarioglu, A. F.; Solgaard, O. // Journal of Applied Physics;Mar2011, Vol. 109 Issue 6, p064316 

    Cantilevers with interferometric high bandwidth force sensors can resolve nonlinear tip-sample interaction forces in tapping-mode atomic force microscopy. In this paper, we provide a detailed analysis of time-resolved force measurements using such cantilever. We first model the probe as a...

  • SURFACE METROLOGY TOOLS SUPPORT QUALITY NEEDS. Lara, Hector; Anderson, Geoff // Quality;May2007, Vol. 46 Issue 5, p26 

    The article focuses on the instruments used for measuring surface topography. White light interferometry, also referred as optical profilometry, uses light waves to profile a surface. An optical profiler is a type of microscope which directs light to the surface under test. A stylus profilometer...

  • Note: Exciting higher-order flexural modes of freestanding microstructures with square wave driving signals. Chow, Jacky; Yongjun Lai // Review of Scientific Instruments;Jun2010, Vol. 81 Issue 6, p066102 

    We examine using the harmonics of low fundamental frequency (f1) square waveforms to electrostatically excite higher-order flexural modes of a micromechanical structure in higher (>f1) frequency regimes. Square wave signals swept between a fundamental frequency range of ∼0–333 kHz...

  • Preparation of Ultrasmooth and Defect-Free 4H-SiC(0001) Surfaces by Elastic Emission Machining. Kubota, Akihisa; Mimura, Hidekazu; Inagaki, Kouji; Arima, Kenta; Mori, Yuzo; Yamauchi, Kazuto // Journal of Electronic Materials;Apr2005, Vol. 34 Issue 4, p439 

    In this work, elastic emission machining (EEM), which is a precise surface-preparation technique using chemical reactions between the surfaces of work and fine powder particles, is applied to the flattening 4H-SiC (0001) surface. Prepared surfaces are observed and characterized by optical...

  • STEP-HEIGHT MEASUREMENT OF SURFACE FUNCTIONALIZED MICROMACHINED MICROCANTILEVER USING SCANNING WHITE LIGHT INTERFEROMETRY. Kurhekar, Anil Sudhakar; Apte, P. R. // International Journal of Advances in Engineering & Technology;Jan2012, Vol. 1 Issue 6, p241 

    Micro-cantilever arrays with different dimensions are fabricated by micromachining technique onto silicon <1 0 0> substrate. These sputtered Gold-Coated micro-cantilevers were later surface functionalized. Scanning Electron Microscopy, Atomic Force Microscopy and Optical SWLI using LASER probe...

  • High Resolution Viscosity Measurement by Thermal Noise Detection. Sandoval, Felipe Aguilar; Sepúlveda, Manuel; Bellon, Ludovic; Melo, Francisco // Sensors (14248220);Nov2015, Vol. 15 Issue 11, p27905 

    An interferometric method is implemented in order to accurately assess the thermal fluctuations of a micro-cantilever sensor in liquid environments. The power spectrum density (PSD) of thermal fluctuations together with Sader's model of the cantilever allow for the indirect measurement of the...

Share

Read the Article

Courtesy of VIRGINIA BEACH PUBLIC LIBRARY AND SYSTEM

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics