Parallel atomic force microscopy with optical interferometric detection

Sulchek, T.; Grow, R. J.; Yaralioglu, G. G.; Minne, S. C.; Quate, C. F.; Manalis, S. R.; Kiraz, A.; Aydine, A.; Atalar, A.
March 2001
Applied Physics Letters;3/19/2001, Vol. 78 Issue 12, p1787
Academic Journal
We have developed an atomic force microscope that uses interferometry for parallel readout of a cantilever array. Each cantilever contains a phase sensitive diffraction grating consisting of a reference and movable set of interdigitated fingers. As a force is applied to the tip, the movable set is displaced and the intensity of the diffracted orders is altered. The order intensity from each cantilever is measured with a custom array of silicon photodiodes with integrated complementary metal-oxide-semiconductor amplifiers. We present images from five cantilevers acquired in the constant height mode that reveal surface features 2 nm in height. The interdigital method for cantilever array readout is scalable, provides angstrom resolution, and is potentially simpler to implement than other methods. © 2001 American Institute of Physics.


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