Optically pumped parametric amplification for micromechanical oscillators

Zalalutdinov, M.; Olkhovets, A.; Zehnder, A.; Ilic, B.; Czaplewski, D.; Craighead, H. G.; Parpia, J. M.
May 2001
Applied Physics Letters;5/14/2001, Vol. 78 Issue 20, p3142
Academic Journal
Micromechanical oscillators in the rf range were fabricated in the form of silicon discs supported by a SiO[sub 2] pillar at the disk center. A low-power laser beam, (P[sub laser]∼100 μW), focused at the periphery of the disk, causes a significant change of the effective spring constant producing a frequency shift, Δf(Δf/f∼10[sup -4]). The high quality factor, Q, of the disk oscillator (Q∼10[sup 4]) allows us to realize parametric amplification of the disk's vibrations through a double frequency modulation of the laser power. An amplitude gain of up to 30 was demonstrated, with further increase limited by nonlinear behavior and self-generation. Phase dependence, inherent in degenerate parametric amplification, was also observed. Using this technique, the sensitivity of detection of a small force is greatly enhanced. © 2001 American Institute of Physics.


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