Creating process margin in laser thermal processing: Application to formation of titanium silicide

Verma, G.; Talwar, S.; Bravman, J. C.
February 2001
Applied Physics Letters;2/12/2001, Vol. 78 Issue 7, p925
Academic Journal
Recently, we have demonstrated that, due to differential thermal budget, laser silicidation is an attractive alternative for deep submicron metal-oxide field effect transistors. In laser thermal processing, any spatial beam nonuniformities or pulse to pulse energy fluctuations lead to varying Si melt depth and hence variations in the silicide depth. In this letter, we report that amorphization is a possible solution for this problem. We demonstrate that stochiometric titanium disilicide can be fabricated using laser thermal processing. We also show that the depth of the silicide can be defined by amorphization and that process margin can be created in laser thermal processing. © 2001 American Institute of Physics.


Related Articles

  • Laser machining breakthrough. Proctor, Paul // Aviation Week & Space Technology;9/23/1996, Vol. 145 Issue 13, p13 

    Informs that an automatic laser machining process for complex, three-dimensional ceramic parts has been developed by researchers at the Illinois Institute of Technology's Midwest Laser Center. What the shaping technique entails; The process reducing thermal stress; What feasibility studies...

  • Cutting costs with laser triangulation. Dwulet, Robert J.; Mraz, Stephen // Machine Design;11/7/94, Vol. 66 Issue 21, p110 

    Discusses various aspects regarding laser sensors. Role of laser sensors in motion control and factory automation systems; Advanced laser diodes' use of optical triangulation; Principle of laser-diode systems; Materials unsuitable for laser sensors; Parameters used in laser sensors.

  • Detailed work.  // Professional Engineering;7/28/2010, Vol. 23 Issue 12, p40 

    The article reports on the development of a laser beam-induced surface modification, which uses a power beam to melt and displace a material, by the Welding Institute (WI) in Great Britain.

  • Performance monitoring saves time and money. Green, Lawrence // Laser Focus World;Jun2002, Vol. 38 Issue 6, p71 

    Deals with the benefits of using source monitoring in characterizing and verifying industrial laser performance. Information on source monitoring; Categories of the technology for source monitoring; Development of a data acquisition and control system based on the source monitoring technology. ...

  • COMPUTING WITH LIGHT. Chaffin, Kenny A. // Poptronics;Jun2001, Vol. 2 Issue 6, p25 

    Discusses the nature and development of optical computers or computers that use laser beams instead of wires. Properties of light; History of optical-computer research; Different kinds of lasers used; Use of holograms to compute; Promises of optical technology.

  • All-reflective interferometric autocorrelator for the measurement of ultra-short optical pulses. Mashiko, H.; Suda, A.; Midorikawa, K. // Applied Physics B: Lasers & Optics;2003, Vol. 76 Issue 5, p525 

    We have developed a novel interferometric autocorrelator composed of only reflective elements, which functions as a beam splitter and an optical delay line. Analytical expressions are derived to give second-order autocorrelation functions and deconvolution factors for various conditions. The...

  • Laser beam detects machine tool damage.  // Professional Engineering;07/05/2000, Vol. 13 Issue 13, p56 

    Reports on the use of an intense laser beam to identify damage in the smallest tools. Use of visible laser light in an optical sensor; Detection range; Product dimensions.

  • CALENDAR.  // Industrial Laser Solutions;Jul/Aug2015, Vol. 30 Issue 4, p31 

    A calendar of events related to industrial application of lasers, from August-November 2015 is presented including the Medical Laser Safety Officer Training, Westec 2015 trade show and the Successful Industrial Welding Techniques and Applications with Laser and Electron Beam workshop.

  • Laser-Assisted Machining.  // Popular Mechanics;Jul2000, Vol. 177 Issue 7, p30 

    Offers a look at the laser-assisted machining technique for ceramics developed by Yung C. Shin, professor at Purdue University. How the technology works; Cutting tool used.


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics