Langasite for high-temperature bulk acoustic wave applications

Fritze, H.; Tuller, H. L.
February 2001
Applied Physics Letters;2/12/2001, Vol. 78 Issue 7, p976
Academic Journal
Langasite (La[sub 3]Ga[sub 5]SiO[sub 14]) and related compounds are promising candidates for high-temperature piezoelectric applications. To determine the stable operation of langasite as a high-temperature bulk acoustic wave (BAW) resonator, we characterized electrical conductivity [σ[sub el]=1.56xexp(-1.07 eV/kT)S/cm] and oxygen diffusivity [D[sub ox][sup T]=5x10[sup -5] exp(-1.45 eV/kT)cm[sup 2]/s] up to elevated temperatures. Langasite was successfully operated up to 900 °C as a BAW resonator with an average mass sensitivity of about 0.17 μg Hz-1 cm-2. This enables, in principle, high-temperature monitoring of deposition rates and thermogravimetry with high sensitivity. © 2001 American Institute of Physics.


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