Reduction in surface recombination of GaInAsP microcolumns by CH[sub 4] plasma irradiation

Ichikawa, Hiroyuki; Inoshita, Kyoji; Baba, Toshihiko
April 2001
Applied Physics Letters;4/9/2001, Vol. 78 Issue 15, p2119
Academic Journal
We evaluated the surface recombination velocity v[sub s] of 1.55 μm GaInAsP microcolumns through the measurement of carrier lifetime using the phase-resolved spectroscopy. We investigated various surface treatments and confirmed that v[sub s] was reduced to nearly half of that for as-etched microcolumns by CH[sub 4] electron cyclotron resonance plasma irradiation. This result was ensured by the two- to fivefold increase in photoluminescence intensity. The secondary ion mass spectroscopy analysis suggested that the reduction in v[sub s] was attributable to the deposition of a polymer, the hydrogenated hard carbon, etc., and/or a carbon deep level formed near the surface.


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