TITLE

Fabrication of nanoperiodic surface structures by controlled etching of dislocations in bicrystals

AUTHOR(S)
Wind, Rikard A.; Murtagh, Martin J.; Mei, Fang; Wang, Yu; Hines, Melissa A.; Sass, Stephen L.
PUB. DATE
April 2001
SOURCE
Applied Physics Letters;4/9/2001, Vol. 78 Issue 15, p2205
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A method for the fabrication of periodic arrays of surface features with controlled spacings of 2-100 nm has been developed. This process relies on the selective etching of dislocations formed at a twist-bonded interface in a bicrystal. The production of nanoscale periodic silicon surface features with a mean spacing of 38 nm is reported. The etch rate of edge and screw dislocations is compared, and the rate of dislocation etching is found to be poorly correlated to strain. This observation calls long-held theories of dislocation etching into question.
ACCESSION #
4710511

 

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