Strain-driven self-positioning of micromachined structures

Vaccaro, Pablo O.; Kubota, Kazuyoshi; Aida, Tahito
May 2001
Applied Physics Letters;5/7/2001, Vol. 78 Issue 19, p2852
Academic Journal
We introduce a method to make self-positioned micromachined structures by using the strain in a pair of lattice-mismatched epitaxial layers. This method allows the fabrication of simple and robust hinges for movable parts, and it can be applied to any pair of lattice-mismatched epitaxial layers, in semiconductors or metals. As an application example, a standing mirror was fabricated. A multilayer structure including an AlGaAs/GaAs dielectric mirror and an InGaAs strained layer was grown by molecular-beam epitaxy on a GaAs substrate. After releasing the multilayer structure from the substrate by selective etching, it moved to its final position powered by the strain release in the InGaAs layer. © 2001 American Institute of Physics.


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