TITLE

Structural modification of single-axis-oriented yttria-stabilized-zirconia films under zirconium ion bombardment

AUTHOR(S)
Voevodin, A. A.; Jones, J. G.; Zabinski, J. S.
PUB. DATE
February 2001
SOURCE
Applied Physics Letters;2/5/2001, Vol. 78 Issue 6, p730
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Crystal size and orientation control of yttria-stabilized-zirconia (YSZ) films produced by pulsed-laser deposition under zirconium-ion bombardment are reported. A structure development mechanism is proposed based on the correlation between ablated plasma chemistry, velocity distributions of atomic and molecular species in the plasma, bombardment energy, time, incidence angle, film crystal size, and orientation. A near-room-temperature growth of single-axis-oriented YSZ films with (002) texture on randomly oriented polycrystalline substrates is demonstrated. © 2001 American Institute of Physics.
ACCESSION #
4710320

 

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