Self-repair of ordered pattern of nanometer dimensions based on self-compensation properties of anodic porous alumina

Masuda, Hideki; Yotsuya, Masato; Asano, Mari; Nishio, Kazuyuki; Nakao, Masashi; Yokoo, Atsushi; Tamamura, Toshiaki
February 2001
Applied Physics Letters;2/5/2001, Vol. 78 Issue 6, p826
Academic Journal
The self-repair of an ordered pattern of nanometer dimensions based on the self-compensation properties of anodic porous alumina is demonstrated. In a pretextured pattern formed on Al using the nanoindentation process with an array of convexes, the deficiency sites of the pattern were found to be compensated automatically during the anodization. Combining the self-compensation properties of the pore configuration of the anodic porous alumina with the preparation of a replica of the compensated porous structure allowed us to develop a process which has the capability of self-repairing the imperfections in the starting pattern. It was confirmed that deficiencies in the starting pattern could be repaired automatically in the Ni pattern regenerated using the self-compensated anodic porous alumina as a template. © 2001 American Institute of Physics.


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