TITLE

Nanometer air gaps in semiconductor wafer bonding

AUTHOR(S)
Liau, Z. L.; Liau, A. A.
PUB. DATE
June 2001
SOURCE
Applied Physics Letters;6/4/2001, Vol. 78 Issue 23, p3726
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Evanescent-wave tunneling of visible light is shown to be sensitive to the nanometer air gaps between dielectrics of high refractive indices. The narrow air gap in molecular-force bonded GaP/GaP was then measured to be 1.3 nm. © 2001 American Institute of Physics.
ACCESSION #
4710218

 

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