Nanometer air gaps in semiconductor wafer bonding

Liau, Z. L.; Liau, A. A.
June 2001
Applied Physics Letters;6/4/2001, Vol. 78 Issue 23, p3726
Academic Journal
Evanescent-wave tunneling of visible light is shown to be sensitive to the nanometer air gaps between dielectrics of high refractive indices. The narrow air gap in molecular-force bonded GaP/GaP was then measured to be 1.3 nm. © 2001 American Institute of Physics.


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