Ultraviolet-extended real-time spectroscopic ellipsometry for characterization of phase evolution in BN thin films

Zapien, J. A.; Messier, R.; Collins, R. W.
April 2001
Applied Physics Letters;4/2/2001, Vol. 78 Issue 14, p1982
Academic Journal
Real-time spectroscopic ellipsometry with an ultraviolet-extended spectral range (1.5-6.5 eV) has been applied to investigate the sputter deposition of boron nitride (BN) thin films with high cubic content in terms of a two-layer optical model. In this model, the inner and outer layers represent sp[sup 2]- and sp[sup 3]-bonded BN (hBN and cBN), respectively. The thickness evolution of the two layers as well as their dielectric functions over the extended spectral range have been determined. © 2001 American Institute of Physics.


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