High-spatial-resolution semiconductor characterization using a microwave eddy current probe

Watson, C. C.; Chan, Winston K.
January 2001
Applied Physics Letters;1/1/2001, Vol. 78 Issue 1, p129
Academic Journal
We report on the design and application of a high-resolution microwave eddy current probe that consists of a microfabricated coil with inner and outer widths of 6 and 20 μm, respectively, integrated with a coplanar waveguide. In addition to improved spatial resolution, we implement a stub-matching technique, which enables us to make high-sensitivity measurements. We demonstrate the utility of our device by measuring the minority-carrier lifetime in a thin In[sub 0.53]Ga[sub 0.47]As film. Although our present demonstration does not allow us to reuse the sample, with minor changes this technique can be made noncontact and nondestructive. © 2001 American Institute of Physics.


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