X-ray phase-contrast imaging with submicron resolution by using extremely asymmetric Bragg diffractions

Kobayashi, Kenji; Izumi, Koichi; Kimura, Hidekazu; Kimura, Shigeru; Ibuki, Takashi; Yokoyama, Yoshiyuki; Tsusaka, Yoshiyuki; Kagoshima, Yasushi; Matsui, Junji
January 2001
Applied Physics Letters;1/1/2001, Vol. 78 Issue 1, p132
Academic Journal
We have obtained x-ray phase-contrast images with high spatial resolution by using extremely asymmetric Si 111 Bragg diffractions near the critical angle of the total reflection. The x-ray image could be magnified to 294 times in both vertical and horizontal directions. By using this x-ray microscopy system, we have observed clear phase-contrast images of a 0.7-μm-wide gold-line pattern. © 2001 American Institute of Physics.


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